Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2/ORE with Al2O3 mask: Difference between revisions
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{| border="1" style="text-align: center; width: 650px; height: 200px" | {| border="1" style="text-align: center; width: 650px; height: 200px" | ||
|+ 1μm Pillar recipe from March 2022 - #244 = 122 min | |+ 1μm Pillar recipe from March 2022 - #244 = 122 min | ||
|-style="background: | |-style="background:LightGray; color:Black" | ||
! [[File:compare pillars.png|200px|thumb|'''''Pillars with different etching times.''''']] !! Time (s) !! Pressure (valve control) !! O<sub>2</sub> flow (SCCM) !! SF<sub>6</sub> flow (SCCM) !! Platen power (W) | ! [[File:compare pillars.png|200px|thumb|'''''Pillars with different etching times.''''']] !! Time (s) !! Pressure (valve control) !! O<sub>2</sub> flow (SCCM) !! SF<sub>6</sub> flow (SCCM) !! Platen power (W) | ||
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