Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2/ORE with Al2O3 mask: Difference between revisions
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{| border="1" style="text-align: center; width: 650px; height: 200px" | {| border="1" style="text-align: center; width: 650px; height: 200px" | ||
|+ 1μm Pillar recipe from March 2022 - #244 = 122 min | |+ 1μm Pillar recipe from March 2022 - #244 = 122 min | ||
|-style="background:DarkGray; color:White" | |-style="background:DarkGray; color:White" | ||
! !! Time (s) !! Pressure (valve control) !! O<sub>2</sub> flow (SCCM) !! SF<sub>6</sub> flow (SCCM) !! Platen power (W) !! Profile | ! !! Time (s) !! Pressure (valve control) !! O<sub>2</sub> flow (SCCM) !! SF<sub>6</sub> flow (SCCM) !! Platen power (W) !! Profile | ||
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|- | |- | ||
| '''E<sub>2</sub>-step''' || 7 || 4% || 0 || 350 || 300 || | | '''E<sub>2</sub>-step''' || 7 || 4% || 0 || 350 || 300 || | ||
[[File:compare pillars.png|400px|thumb|'''''Pillars with different etching times.''''']] | |[[File:compare pillars.png|400px|thumb|'''''Pillars with different etching times.''''']] | ||
|} | |} | ||