Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2/ORE with Al2O3 mask: Difference between revisions
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[[File:compare pillars.png|400px|thumb|'''''Pillars with different etching times.''''']] | [[File:compare pillars.png|400px|thumb|'''''Pillars with different etching times.''''']] | ||
{| border="1" style="text-align: center; width: 650px; height: 200px" | {| border="1" style="text-align: center; width: 650px; height: 200px" | ||
|+ 1μm Pillar recipe from March 2022 | |+ 1μm Pillar recipe from March 2022 - #244 = 122 min | ||
|- | |- | ||
|-style="background:DarkGray; color:White" | |-style="background:DarkGray; color:White" | ||
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=== Holes === | === Holes === | ||
[[File:17.6 holes.png|400px|thumb|'''''17.6 μm holes profile.''''']] | |||
{| border="1" style="text-align: center; width: 650px; height: 200px" | {| border="1" style="text-align: center; width: 650px; height: 200px" | ||
|+ 1μm holes recipe from March 2022 | |+ 1μm holes recipe from March 2022 - #288 = 120 min | ||
|- | |- | ||
|-style="background:DarkGray; color:White" | |-style="background:DarkGray; color:White" | ||
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| '''E<sub>2</sub>-step''' || 1-5 || 220 mTorr || 0 || 1200 || 1 || 2000 | | '''E<sub>2</sub>-step''' || 1-5 || 220 mTorr || 0 || 1200 || 1 || 2000 | ||
|} | |} | ||
<br clear="all" /> | <br clear="all" /> | ||