Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2/ORE with Al2O3 mask: Difference between revisions
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=== Pillars === | === Pillars === | ||
[[File:compare pillars.png| | [[File:compare pillars.png|400px|thumb|'''''Pillars with different etching times.''''']] | ||
{| border="1" style="text-align: center; width: 650px; height: 200px" | {| border="1" style="text-align: center; width: 650px; height: 200px" | ||
|+ 1μm Pillar recipe from March 2022 | |+ 1μm Pillar recipe from March 2022 | ||