Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2/ORE with Al2O3 mask: Difference between revisions
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| '''E<sub>2</sub>-step''' || 1-5 || 220 mTorr || 0 || 1200 || 1 || 2000 | | '''E<sub>2</sub>-step''' || 1-5 || 220 mTorr || 0 || 1200 || 1 || 2000 | ||
|} | |} | ||
[[File:drawing (1).png|400px|thumb|'''''17.6 μm holes profile.''''']] | |||