Specific Process Knowledge/Etch/Wet Platinum Etch: Difference between revisions
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Platinum can be etched by the following wet etch: | Platinum can be etched by the following wet etch: | ||
* | *H<sub>2</sub>O : HCl : HNO<sub>3</sub> (8 : 7 : 1) at 85 °C (note: etching starts at 70 C, 170nm etched in 5 min 70 C-85 C)* Nisoer July 2022 | ||
'''You have to be very careful when you work with this etch. It can generate nitrous oxides which are very toxic!!''' | '''You have to be very careful when you work with this etch. It can generate nitrous oxides which are very toxic!!''' | ||