Specific Process Knowledge/Thin film deposition/Deposition of Silicon Oxide: Difference between revisions
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At DANCHIP you can also deposit silicon oxide using [[Specific Process Knowledge/Thin film deposition/Lesker|Lesker]] sputter system. One of the advantages here is that you can deposite on any material you like. | At DANCHIP you can also deposit silicon oxide using [[Specific Process Knowledge/Thin film deposition/Lesker|Lesker]] sputter system. One of the advantages here is that you can deposite on any material you like. | ||
== | ==Comparison of the methods for deposition of Silicon Oxide== | ||
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