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Specific Process Knowledge/Thin film deposition/Deposition of Carbon: Difference between revisions

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== Deposition of Carbon ==
== Deposition of Carbon ==


Carbon can be deposited by DC-sputtering method. So far the process has been tested only using Sputter-System (Lesker):
Carbon can be deposited by DC-sputtering method. So far the process has been tested only using [[Specific Process Knowledge/Thin film deposition/Lesker|Sputter-System (Lesker)]]:


*[[/Deposition of C in Sputter-System Lesker|Deposition of Carbon in Sputter-System (Lesker)]]
*[[/Deposition of C in Sputter-System Lesker|Deposition of Carbon in Sputter-System (Lesker)]]
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