Specific Process Knowledge/Thin film deposition/Deposition of Carbon: Difference between revisions

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center><span style="background:PaleGreen">3rd Level - Material/Method</span></center>
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== Deposition of Carbon ==
== Deposition of Carbon ==



Revision as of 20:08, 20 December 2022

center>3rd Level - Material/Method

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Deposition of Carbon

Carbon can be deposited by DC-sputtering method. So far the process has been tested only using Sputter-System (Lesker):