Specific Process Knowledge/Lithography/EBeamLithography/FilePreparation/Pathlist: Difference between revisions
Created page with ";;*** Mask Exposure Peformance Test *** MASK00: INITIAL HEIMAP,CURRNT,INITBE,PDEFBE,DISTBE,PDEFBE,SUBDEFBE CYCLIC CURRNT,DRIFT CYCLE 5M MASK01: INITIAL HEIMAP,CURRNT,INITBE,PDEFBE,SUBDEFBE CYCLIC CURRNT,DRIFT CYCLE 5M ;;*** Direct Exposure Peformance Test *** DIRE00: INITIAL CURRNT,INITBE,PDEFBE,DISTBE,PDEFBE,SUBDEFBE CYCLIC CURRNT CYCLE 5M DIRE01: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE CYCLIC CURR..." |
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TEST07: INITIAL CURRNT,INITBE,PDEFBE,DISTBE,SUBDEFBE | TEST07: INITIAL CURRNT,INITBE,PDEFBE,DISTBE,SUBDEFBE | ||
TEST08: INITIAL HEIMAP,CURRNT,INITBE,PDEFBE,DISTBE,SUBDEFBE | TEST08: INITIAL HEIMAP,CURRNT,INITBE,PDEFBE,DISTBE,SUBDEFBE | ||
TEST09: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE | TEST09: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE | ||
CYCLIC CURRNT,DRIFT | CYCLIC CURRNT,DRIFT | ||
CYCLE 1 | CYCLE 1 | ||
TEST10: INITIAL HEIMAP,CURRNT,INITBE,PDEFBE,SUBDEFBE | TEST10: INITIAL HEIMAP,CURRNT,INITBE,PDEFBE,SUBDEFBE | ||
CYCLIC CURRNT,DRIFT | CYCLIC CURRNT,DRIFT | ||
CYCLE 1 | CYCLE 1 | ||
TEST11: INITIAL CURRNT,INITBE,PDEFBE,DISTBE,SUBDEFBE | TEST11: INITIAL CURRNT,INITBE,PDEFBE,DISTBE,SUBDEFBE | ||
CYCLIC CURRNT,DRIFT | CYCLIC CURRNT,DRIFT | ||
CYCLE 5M, F | CYCLE 5M, F | ||
TEST12: INITIAL HEIMAP,CURRNT,INITBE,PDEFBE,DISTBE,SUBDEFBE | TEST12: INITIAL HEIMAP,CURRNT,INITBE,PDEFBE,DISTBE,SUBDEFBE | ||
CYCLIC CURRNT,DRIFT | CYCLIC CURRNT,DRIFT | ||
CYCLE 5M, F | CYCLE 5M, F | ||
TEST13: INITIAL INITAE,INITBE,CURRNT,PDEFBE | TEST13: INITIAL INITAE,INITBE,CURRNT,PDEFBE | ||
CYCLIC DRIFT | CYCLIC DRIFT | ||
CYCLE 1M, F | CYCLE 1M, F | ||
TEST14: INITIAL CURRNT | TEST14: INITIAL CURRNT | ||
CYCLIC DRIFT | CYCLIC DRIFT | ||
CYCLE 99 | CYCLE 99 | ||
DRIFT0: INITIAL INITAE, INITBE | DRIFT0: INITIAL INITAE, INITBE | ||
CYCLIC INITAE, INITBE, DRIFT, CURRNT | CYCLIC INITAE, INITBE, DRIFT, CURRNT | ||
CYCLE 1 | CYCLE 1 | ||
DRIFT1: INITIAL INITAE, INITBE | DRIFT1: INITIAL INITAE, INITBE | ||
CYCLIC INITAE, INITBE, DRIFT, CURRNT | CYCLIC INITAE, INITBE, DRIFT, CURRNT | ||
CYCLE 1M,F | CYCLE 1M,F | ||
LONG01: INITIAL CURRNT,INITBE,PDEFBE,DISTBE,SUBDEFBE | LONG01: INITIAL CURRNT,INITBE,PDEFBE,DISTBE,SUBDEFBE | ||
CYCLIC CURRNT,DRIFT | CYCLIC CURRNT,DRIFT | ||
CYCLE 5M | CYCLE 5M | ||
LONG02: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE | LONG02: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE | ||
CYCLIC CURRNT,DRIFT,INITBE,PDEFBE,SUBDEFBE | CYCLIC CURRNT,DRIFT,INITBE,PDEFBE,SUBDEFBE | ||
CYCLE 5M | CYCLE 5M | ||
MINI02: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE | MINI02: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE | ||
CYCLIC CURRNT,INITBE | CYCLIC CURRNT,INITBE | ||
CYCLE 20M | CYCLE 20M | ||
HEIGH1: INITIAL HEIMAP,CURRNT | HEIGH1: INITIAL HEIMAP,CURRNT | ||
CYCLIC CURRNT,DRIFT | CYCLIC CURRNT,DRIFT | ||
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CYCLIC DRIFT,CURRNT | CYCLIC DRIFT,CURRNT | ||
CYCLE 4 | CYCLE 4 | ||
MASK03: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE | MASK03: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE | ||
CYCLIC CURRNT,DRIFT | CYCLIC CURRNT,DRIFT | ||
CYCLE 5M | CYCLE 5M | ||
MASK04: INITIAL CURRNT,INITBE,PDEFBE,DISTBE,PDEFBE,SUBDEFBE | MASK04: INITIAL CURRNT,INITBE,PDEFBE,DISTBE,PDEFBE,SUBDEFBE | ||
CYCLIC CURRNT,DRIFT | CYCLIC CURRNT,DRIFT | ||
CYCLE 5M | CYCLE 5M | ||
MASK05: INITIAL HEIMAP,CURRNT,INITBE,PDEFBE,DISTBE,SUBDEFBE | MASK05: INITIAL HEIMAP,CURRNT,INITBE,PDEFBE,DISTBE,SUBDEFBE | ||
CYCLIC CURRNT,DRIFT | CYCLIC CURRNT,DRIFT | ||
CYCLE 5M | CYCLE 5M | ||
MASK06: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE | MASK06: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE | ||
CYCLIC INITBE,PDEFBE,SUBDEFBE,CURRNT,DRIFT | CYCLIC INITBE,PDEFBE,SUBDEFBE,CURRNT,DRIFT | ||
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AUTO00: INITIAL CURRNT,INITBE,PDEFBE,DISTBE,PDEFBE,SUBDEFBE | AUTO00: INITIAL CURRNT,INITBE,PDEFBE,DISTBE,PDEFBE,SUBDEFBE | ||
DIRE02: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE | DIRE02: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE | ||
DIRE03: INITIAL CURRNT,INITBE | DIRE03: INITIAL CURRNT,INITBE | ||
CYCLIC CURRNT,DRIFT | CYCLIC CURRNT,DRIFT | ||
CYCLE 20M | CYCLE 20M | ||
DIRE04: INITIAL CURRNT,INITBE,PDEFBE | DIRE04: INITIAL CURRNT,INITBE,PDEFBE | ||
CYCLIC CURRNT | CYCLIC CURRNT | ||
CYCLE 20M | CYCLE 20M | ||
DIRE05: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE | DIRE05: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE | ||
CYCLIC CURRNT | CYCLIC CURRNT | ||
CYCLE 20M | CYCLE 20M | ||
DIRE06: INITIAL CURRNT,INITBE,PDEFBE,DISTBE,SUBDEFBE | DIRE06: INITIAL CURRNT,INITBE,PDEFBE,DISTBE,SUBDEFBE | ||
CYCLIC CURRNT | CYCLIC CURRNT | ||
CYCLE 20M | CYCLE 20M | ||
DIRE07: INITIAL CURRNT,INITBE,PDEFBE,DISTBE,PDEFBE,SUBDEFBE | DIRE07: INITIAL CURRNT,INITBE,PDEFBE,DISTBE,PDEFBE,SUBDEFBE | ||
CYCLIC CURRNT | CYCLIC CURRNT | ||
CYCLE 20M | CYCLE 20M | ||
DRFT01: INITIAL CURRNT | DRFT01: INITIAL CURRNT | ||
CYCLIC DRIFT | CYCLIC DRIFT | ||
CYCLE 1 | CYCLE 1 | ||
SBG01: INITIAL HEIMAP,CURRNT,INITBE,PDEFBE,SUBDEFBE | SBG01: INITIAL HEIMAP,CURRNT,INITBE,PDEFBE,SUBDEFBE | ||
SBG02: INITIAL HEIMAP | SBG02: INITIAL HEIMAP | ||
SBG03: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE | SBG03: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE | ||
CYCLIC CURRNT,DRIFT | CYCLIC CURRNT,DRIFT | ||
CYCLE 5M | CYCLE 5M | ||
SBG04: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE | SBG04: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE | ||
CYCLIC CURRNT,DRIFT | CYCLIC CURRNT,DRIFT | ||
CYCLE 5M | CYCLE 5M | ||
SBG05: INITIAL CURRNT | SBG05: INITIAL CURRNT | ||
CYCLIC CURRNT,DRIFT | CYCLIC CURRNT,DRIFT | ||
CYCLE 5M | CYCLE 5M | ||
SBG06: INITIAL HEIMAP | SBG06: INITIAL HEIMAP | ||
CYCLIC CURRNT,DRIFT | CYCLIC CURRNT,DRIFT | ||
CYCLE 5M | CYCLE 5M | ||
SBG07: INITIAL CURRNT | SBG07: INITIAL CURRNT | ||
CYCLIC CURRNT,DRIFT | CYCLIC CURRNT,DRIFT | ||
CYCLE 34 | CYCLE 34 | ||
TOK01: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE | TOK01: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE | ||
CYCLIC CURRNT,DRIFT | CYCLIC CURRNT,DRIFT | ||
CYCLE 20M | CYCLE 20M | ||
G5MHA: INITIAL HEIMAP | G5MHA: INITIAL HEIMAP | ||
CYCLIC CURRNT,DRIFT | CYCLIC CURRNT,DRIFT | ||
CYCLE 5M | CYCLE 5M | ||
G5MHB: INITIAL HEIMAP | G5MHB: INITIAL HEIMAP | ||
CYCLIC DRIFT | CYCLIC DRIFT | ||
CYCLE 5M | CYCLE 5M | ||
G5MA: INITIAL CURRNT | G5MA: INITIAL CURRNT | ||
CYCLIC CURRNT,DRIFT | CYCLIC CURRNT,DRIFT | ||
CYCLE 5M | CYCLE 5M | ||
G5MB: INITIAL CURRNT | G5MB: INITIAL CURRNT | ||
CYCLIC DRIFT | CYCLIC DRIFT | ||
CYCLE 5M | CYCLE 5M | ||
G34HA: INITIAL HEIMAP | G34HA: INITIAL HEIMAP | ||
CYCLIC CURRNT,DRIFT | CYCLIC CURRNT,DRIFT | ||
CYCLE 34 | CYCLE 34 | ||
G34HB: INITIAL HEIMAP | G34HB: INITIAL HEIMAP | ||
CYCLIC DRIFT | CYCLIC DRIFT | ||
CYCLE 34 | CYCLE 34 | ||
G34A: INITIAL CURRNT | G34A: INITIAL CURRNT | ||
CYCLIC CURRNT,DRIFT | CYCLIC CURRNT,DRIFT | ||
CYCLE 34 | CYCLE 34 | ||
G34B: INITIAL CURRNT | G34B: INITIAL CURRNT | ||
CYCLIC DRIFT | CYCLIC DRIFT | ||
CYCLE 34 | CYCLE 34 | ||
G1HA: INITIAL HEIMAP | G1HA: INITIAL HEIMAP | ||
CYCLIC CURRNT,DRIFT | CYCLIC CURRNT,DRIFT | ||
CYCLE 1 | CYCLE 1 | ||
G1HB: INITIAL HEIMAP | G1HB: INITIAL HEIMAP | ||
CYCLIC DRIFT | CYCLIC DRIFT | ||
CYCLE 1 | CYCLE 1 | ||
G1A: INITIAL CURRNT | G1A: INITIAL CURRNT | ||
CYCLIC CURRNT,DRIFT | CYCLIC CURRNT,DRIFT | ||
CYCLE 1 | CYCLE 1 | ||
G1B: INITIAL CURRNT | G1B: INITIAL CURRNT | ||
CYCLIC DRIFT | CYCLIC DRIFT | ||
CYCLE 1 | CYCLE 1 | ||
HEICU: INITIAL HEIMAP,CURRNT | HEICU: INITIAL HEIMAP,CURRNT | ||
HCD: INITIAL HEIMAP | HCD: INITIAL HEIMAP | ||
CYCLIC CURRNT,DRIFT | CYCLIC CURRNT,DRIFT | ||
CYCLE 30M | CYCLE 30M | ||
CD: INITIAL CURRNT | CD: INITIAL CURRNT | ||
CYCLIC DRIFT | CYCLIC DRIFT | ||
CYCLE 30M | CYCLE 30M | ||
FT01: INITIAL CURRNT | FT01: INITIAL CURRNT | ||
CYCLIC CURRNT,DRIFT | CYCLIC CURRNT,DRIFT | ||
CYCLE 5M,F | CYCLE 5M,F | ||
LONG03: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE | LONG03: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE | ||
CYCLIC CURRNT,DRIFT,INITBE,PDEFBE,SUBDEFBE | CYCLIC CURRNT,DRIFT,INITBE,PDEFBE,SUBDEFBE | ||
CYCLE 5M,F | CYCLE 5M,F | ||
HEI: INITIAL HEIMAP | HEI: INITIAL HEIMAP | ||
CYCLIC CURRNT | CYCLIC CURRNT | ||
CYCLE 10M | CYCLE 10M | ||
DRF5M: INITIAL CURRNT,HEIMAP | DRF5M: INITIAL CURRNT,HEIMAP | ||
CYCLIC CURRNT,DRIFT | CYCLIC CURRNT,DRIFT | ||
CYCLE 5M,F | CYCLE 5M,F | ||
DTU5M: INITIAL HEIMAP,CURRNT,INITBE,PDEFBE,SUBDEFBE | DTU5M: INITIAL HEIMAP,CURRNT,INITBE,PDEFBE,SUBDEFBE | ||
CYCLIC CURRNT,DRIFT | CYCLIC CURRNT,DRIFT | ||
CYCLE 5M,F | CYCLE 5M,F | ||
CUR: INITIAL CURRNT | CUR: INITIAL CURRNT | ||
CYCLIC CURRNT | CYCLIC CURRNT | ||
CYCLE 30M | CYCLE 30M | ||