Specific Process Knowledge/Lithography/EBeamLithography/FilePreparation/Pathlist: Difference between revisions
Created page with ";;*** Mask Exposure Peformance Test *** MASK00: INITIAL HEIMAP,CURRNT,INITBE,PDEFBE,DISTBE,PDEFBE,SUBDEFBE CYCLIC CURRNT,DRIFT CYCLE 5M MASK01: INITIAL HEIMAP,CURRNT,INITBE,PDEFBE,SUBDEFBE CYCLIC CURRNT,DRIFT CYCLE 5M ;;*** Direct Exposure Peformance Test *** DIRE00: INITIAL CURRNT,INITBE,PDEFBE,DISTBE,PDEFBE,SUBDEFBE CYCLIC CURRNT CYCLE 5M DIRE01: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE CYCLIC CURR..." |
No edit summary |
||
| Line 32: | Line 32: | ||
TEST07: INITIAL CURRNT,INITBE,PDEFBE,DISTBE,SUBDEFBE | TEST07: INITIAL CURRNT,INITBE,PDEFBE,DISTBE,SUBDEFBE | ||
TEST08: INITIAL HEIMAP,CURRNT,INITBE,PDEFBE,DISTBE,SUBDEFBE | TEST08: INITIAL HEIMAP,CURRNT,INITBE,PDEFBE,DISTBE,SUBDEFBE | ||
TEST09: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE | TEST09: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE | ||
CYCLIC CURRNT,DRIFT | CYCLIC CURRNT,DRIFT | ||
CYCLE 1 | CYCLE 1 | ||
TEST10: INITIAL HEIMAP,CURRNT,INITBE,PDEFBE,SUBDEFBE | TEST10: INITIAL HEIMAP,CURRNT,INITBE,PDEFBE,SUBDEFBE | ||
CYCLIC CURRNT,DRIFT | CYCLIC CURRNT,DRIFT | ||
CYCLE 1 | CYCLE 1 | ||
TEST11: INITIAL CURRNT,INITBE,PDEFBE,DISTBE,SUBDEFBE | TEST11: INITIAL CURRNT,INITBE,PDEFBE,DISTBE,SUBDEFBE | ||
CYCLIC CURRNT,DRIFT | CYCLIC CURRNT,DRIFT | ||
CYCLE 5M, F | CYCLE 5M, F | ||
TEST12: INITIAL HEIMAP,CURRNT,INITBE,PDEFBE,DISTBE,SUBDEFBE | TEST12: INITIAL HEIMAP,CURRNT,INITBE,PDEFBE,DISTBE,SUBDEFBE | ||
CYCLIC CURRNT,DRIFT | CYCLIC CURRNT,DRIFT | ||
CYCLE 5M, F | CYCLE 5M, F | ||
TEST13: INITIAL INITAE,INITBE,CURRNT,PDEFBE | TEST13: INITIAL INITAE,INITBE,CURRNT,PDEFBE | ||
CYCLIC DRIFT | CYCLIC DRIFT | ||
CYCLE 1M, F | CYCLE 1M, F | ||
TEST14: INITIAL CURRNT | TEST14: INITIAL CURRNT | ||
CYCLIC DRIFT | CYCLIC DRIFT | ||
CYCLE 99 | CYCLE 99 | ||
DRIFT0: INITIAL INITAE, INITBE | DRIFT0: INITIAL INITAE, INITBE | ||
CYCLIC INITAE, INITBE, DRIFT, CURRNT | CYCLIC INITAE, INITBE, DRIFT, CURRNT | ||
CYCLE 1 | CYCLE 1 | ||
DRIFT1: INITIAL INITAE, INITBE | DRIFT1: INITIAL INITAE, INITBE | ||
CYCLIC INITAE, INITBE, DRIFT, CURRNT | CYCLIC INITAE, INITBE, DRIFT, CURRNT | ||
CYCLE 1M,F | CYCLE 1M,F | ||
LONG01: INITIAL CURRNT,INITBE,PDEFBE,DISTBE,SUBDEFBE | LONG01: INITIAL CURRNT,INITBE,PDEFBE,DISTBE,SUBDEFBE | ||
CYCLIC CURRNT,DRIFT | CYCLIC CURRNT,DRIFT | ||
CYCLE 5M | CYCLE 5M | ||
LONG02: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE | LONG02: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE | ||
CYCLIC CURRNT,DRIFT,INITBE,PDEFBE,SUBDEFBE | CYCLIC CURRNT,DRIFT,INITBE,PDEFBE,SUBDEFBE | ||
CYCLE 5M | CYCLE 5M | ||
MINI02: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE | MINI02: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE | ||
CYCLIC CURRNT,INITBE | CYCLIC CURRNT,INITBE | ||
CYCLE 20M | CYCLE 20M | ||
HEIGH1: INITIAL HEIMAP,CURRNT | HEIGH1: INITIAL HEIMAP,CURRNT | ||
CYCLIC CURRNT,DRIFT | CYCLIC CURRNT,DRIFT | ||
| Line 72: | Line 84: | ||
CYCLIC DRIFT,CURRNT | CYCLIC DRIFT,CURRNT | ||
CYCLE 4 | CYCLE 4 | ||
MASK03: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE | MASK03: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE | ||
CYCLIC CURRNT,DRIFT | CYCLIC CURRNT,DRIFT | ||
CYCLE 5M | CYCLE 5M | ||
MASK04: INITIAL CURRNT,INITBE,PDEFBE,DISTBE,PDEFBE,SUBDEFBE | MASK04: INITIAL CURRNT,INITBE,PDEFBE,DISTBE,PDEFBE,SUBDEFBE | ||
CYCLIC CURRNT,DRIFT | CYCLIC CURRNT,DRIFT | ||
CYCLE 5M | CYCLE 5M | ||
MASK05: INITIAL HEIMAP,CURRNT,INITBE,PDEFBE,DISTBE,SUBDEFBE | MASK05: INITIAL HEIMAP,CURRNT,INITBE,PDEFBE,DISTBE,SUBDEFBE | ||
CYCLIC CURRNT,DRIFT | CYCLIC CURRNT,DRIFT | ||
CYCLE 5M | CYCLE 5M | ||
MASK06: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE | MASK06: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE | ||
CYCLIC INITBE,PDEFBE,SUBDEFBE,CURRNT,DRIFT | CYCLIC INITBE,PDEFBE,SUBDEFBE,CURRNT,DRIFT | ||
| Line 87: | Line 103: | ||
AUTO00: INITIAL CURRNT,INITBE,PDEFBE,DISTBE,PDEFBE,SUBDEFBE | AUTO00: INITIAL CURRNT,INITBE,PDEFBE,DISTBE,PDEFBE,SUBDEFBE | ||
DIRE02: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE | DIRE02: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE | ||
DIRE03: INITIAL CURRNT,INITBE | DIRE03: INITIAL CURRNT,INITBE | ||
CYCLIC CURRNT,DRIFT | CYCLIC CURRNT,DRIFT | ||
CYCLE 20M | CYCLE 20M | ||
DIRE04: INITIAL CURRNT,INITBE,PDEFBE | DIRE04: INITIAL CURRNT,INITBE,PDEFBE | ||
CYCLIC CURRNT | CYCLIC CURRNT | ||
CYCLE 20M | CYCLE 20M | ||
DIRE05: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE | DIRE05: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE | ||
CYCLIC CURRNT | CYCLIC CURRNT | ||
CYCLE 20M | CYCLE 20M | ||
DIRE06: INITIAL CURRNT,INITBE,PDEFBE,DISTBE,SUBDEFBE | DIRE06: INITIAL CURRNT,INITBE,PDEFBE,DISTBE,SUBDEFBE | ||
CYCLIC CURRNT | CYCLIC CURRNT | ||
CYCLE 20M | CYCLE 20M | ||
DIRE07: INITIAL CURRNT,INITBE,PDEFBE,DISTBE,PDEFBE,SUBDEFBE | DIRE07: INITIAL CURRNT,INITBE,PDEFBE,DISTBE,PDEFBE,SUBDEFBE | ||
CYCLIC CURRNT | CYCLIC CURRNT | ||
CYCLE 20M | CYCLE 20M | ||
DRFT01: INITIAL CURRNT | DRFT01: INITIAL CURRNT | ||
CYCLIC DRIFT | CYCLIC DRIFT | ||
CYCLE 1 | CYCLE 1 | ||
SBG01: INITIAL HEIMAP,CURRNT,INITBE,PDEFBE,SUBDEFBE | SBG01: INITIAL HEIMAP,CURRNT,INITBE,PDEFBE,SUBDEFBE | ||
SBG02: INITIAL HEIMAP | SBG02: INITIAL HEIMAP | ||
SBG03: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE | SBG03: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE | ||
CYCLIC CURRNT,DRIFT | CYCLIC CURRNT,DRIFT | ||
CYCLE 5M | CYCLE 5M | ||
SBG04: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE | SBG04: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE | ||
CYCLIC CURRNT,DRIFT | CYCLIC CURRNT,DRIFT | ||
CYCLE 5M | CYCLE 5M | ||
SBG05: INITIAL CURRNT | SBG05: INITIAL CURRNT | ||
CYCLIC CURRNT,DRIFT | CYCLIC CURRNT,DRIFT | ||
CYCLE 5M | CYCLE 5M | ||
SBG06: INITIAL HEIMAP | SBG06: INITIAL HEIMAP | ||
CYCLIC CURRNT,DRIFT | CYCLIC CURRNT,DRIFT | ||
CYCLE 5M | CYCLE 5M | ||
SBG07: INITIAL CURRNT | SBG07: INITIAL CURRNT | ||
CYCLIC CURRNT,DRIFT | CYCLIC CURRNT,DRIFT | ||
CYCLE 34 | CYCLE 34 | ||
TOK01: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE | TOK01: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE | ||
CYCLIC CURRNT,DRIFT | CYCLIC CURRNT,DRIFT | ||
CYCLE 20M | CYCLE 20M | ||
G5MHA: INITIAL HEIMAP | G5MHA: INITIAL HEIMAP | ||
CYCLIC CURRNT,DRIFT | CYCLIC CURRNT,DRIFT | ||
CYCLE 5M | CYCLE 5M | ||
G5MHB: INITIAL HEIMAP | G5MHB: INITIAL HEIMAP | ||
CYCLIC DRIFT | CYCLIC DRIFT | ||
CYCLE 5M | CYCLE 5M | ||
G5MA: INITIAL CURRNT | G5MA: INITIAL CURRNT | ||
CYCLIC CURRNT,DRIFT | CYCLIC CURRNT,DRIFT | ||
CYCLE 5M | CYCLE 5M | ||
G5MB: INITIAL CURRNT | G5MB: INITIAL CURRNT | ||
CYCLIC DRIFT | CYCLIC DRIFT | ||
CYCLE 5M | CYCLE 5M | ||
G34HA: INITIAL HEIMAP | G34HA: INITIAL HEIMAP | ||
CYCLIC CURRNT,DRIFT | CYCLIC CURRNT,DRIFT | ||
CYCLE 34 | CYCLE 34 | ||
G34HB: INITIAL HEIMAP | G34HB: INITIAL HEIMAP | ||
CYCLIC DRIFT | CYCLIC DRIFT | ||
CYCLE 34 | CYCLE 34 | ||
G34A: INITIAL CURRNT | G34A: INITIAL CURRNT | ||
CYCLIC CURRNT,DRIFT | CYCLIC CURRNT,DRIFT | ||
CYCLE 34 | CYCLE 34 | ||
G34B: INITIAL CURRNT | G34B: INITIAL CURRNT | ||
CYCLIC DRIFT | CYCLIC DRIFT | ||
CYCLE 34 | CYCLE 34 | ||
G1HA: INITIAL HEIMAP | G1HA: INITIAL HEIMAP | ||
CYCLIC CURRNT,DRIFT | CYCLIC CURRNT,DRIFT | ||
CYCLE 1 | CYCLE 1 | ||
G1HB: INITIAL HEIMAP | G1HB: INITIAL HEIMAP | ||
CYCLIC DRIFT | CYCLIC DRIFT | ||
CYCLE 1 | CYCLE 1 | ||
G1A: INITIAL CURRNT | G1A: INITIAL CURRNT | ||
CYCLIC CURRNT,DRIFT | CYCLIC CURRNT,DRIFT | ||
CYCLE 1 | CYCLE 1 | ||
G1B: INITIAL CURRNT | G1B: INITIAL CURRNT | ||
CYCLIC DRIFT | CYCLIC DRIFT | ||
CYCLE 1 | CYCLE 1 | ||
HEICU: INITIAL HEIMAP,CURRNT | HEICU: INITIAL HEIMAP,CURRNT | ||
HCD: INITIAL HEIMAP | HCD: INITIAL HEIMAP | ||
CYCLIC CURRNT,DRIFT | CYCLIC CURRNT,DRIFT | ||
CYCLE 30M | CYCLE 30M | ||
CD: INITIAL CURRNT | CD: INITIAL CURRNT | ||
CYCLIC DRIFT | CYCLIC DRIFT | ||
CYCLE 30M | CYCLE 30M | ||
FT01: INITIAL CURRNT | FT01: INITIAL CURRNT | ||
CYCLIC CURRNT,DRIFT | CYCLIC CURRNT,DRIFT | ||
CYCLE 5M,F | CYCLE 5M,F | ||
LONG03: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE | LONG03: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE | ||
CYCLIC CURRNT,DRIFT,INITBE,PDEFBE,SUBDEFBE | CYCLIC CURRNT,DRIFT,INITBE,PDEFBE,SUBDEFBE | ||
CYCLE 5M,F | CYCLE 5M,F | ||
HEI: INITIAL HEIMAP | HEI: INITIAL HEIMAP | ||
CYCLIC CURRNT | CYCLIC CURRNT | ||
CYCLE 10M | CYCLE 10M | ||
DRF5M: INITIAL CURRNT,HEIMAP | DRF5M: INITIAL CURRNT,HEIMAP | ||
CYCLIC CURRNT,DRIFT | CYCLIC CURRNT,DRIFT | ||
CYCLE 5M,F | CYCLE 5M,F | ||
DTU5M: INITIAL HEIMAP,CURRNT,INITBE,PDEFBE,SUBDEFBE | DTU5M: INITIAL HEIMAP,CURRNT,INITBE,PDEFBE,SUBDEFBE | ||
CYCLIC CURRNT,DRIFT | CYCLIC CURRNT,DRIFT | ||
CYCLE 5M,F | CYCLE 5M,F | ||
CUR: INITIAL CURRNT | CUR: INITIAL CURRNT | ||
CYCLIC CURRNT | CYCLIC CURRNT | ||
CYCLE 30M | CYCLE 30M | ||
Revision as of 11:27, 16 December 2022
- Mask Exposure Peformance Test ***
MASK00: INITIAL HEIMAP,CURRNT,INITBE,PDEFBE,DISTBE,PDEFBE,SUBDEFBE
CYCLIC CURRNT,DRIFT
CYCLE 5M
MASK01: INITIAL HEIMAP,CURRNT,INITBE,PDEFBE,SUBDEFBE
CYCLIC CURRNT,DRIFT
CYCLE 5M
- Direct Exposure Peformance Test ***
DIRE00: INITIAL CURRNT,INITBE,PDEFBE,DISTBE,PDEFBE,SUBDEFBE
CYCLIC CURRNT
CYCLE 5M
DIRE01: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE
CYCLIC CURRNT
CYCLE 5M
- Minimum Line Exposure Peformance Test ***
MINI01: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE
CYCLIC CURRNT,DRIFT
CYCLE 5M
- Test Exposure ***
TEST00: INITIAL HEIMAP TEST01: INITIAL CURRNT TEST02: INITIAL HEIMAP,CURRNT TEST03: INITIAL CURRNT,INITBE TEST04: INITIAL HEIMAP,CURRNT,INITBE TEST05: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE TEST06: INITIAL HEIMAP,CURRNT,INITBE,PDEFBE,SUBDEFBE TEST07: INITIAL CURRNT,INITBE,PDEFBE,DISTBE,SUBDEFBE TEST08: INITIAL HEIMAP,CURRNT,INITBE,PDEFBE,DISTBE,SUBDEFBE
TEST09: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE
CYCLIC CURRNT,DRIFT
CYCLE 1
TEST10: INITIAL HEIMAP,CURRNT,INITBE,PDEFBE,SUBDEFBE
CYCLIC CURRNT,DRIFT
CYCLE 1
TEST11: INITIAL CURRNT,INITBE,PDEFBE,DISTBE,SUBDEFBE
CYCLIC CURRNT,DRIFT
CYCLE 5M, F
TEST12: INITIAL HEIMAP,CURRNT,INITBE,PDEFBE,DISTBE,SUBDEFBE
CYCLIC CURRNT,DRIFT
CYCLE 5M, F
TEST13: INITIAL INITAE,INITBE,CURRNT,PDEFBE
CYCLIC DRIFT CYCLE 1M, F
TEST14: INITIAL CURRNT
CYCLIC DRIFT
CYCLE 99
DRIFT0: INITIAL INITAE, INITBE
CYCLIC INITAE, INITBE, DRIFT, CURRNT CYCLE 1
DRIFT1: INITIAL INITAE, INITBE
CYCLIC INITAE, INITBE, DRIFT, CURRNT CYCLE 1M,F
LONG01: INITIAL CURRNT,INITBE,PDEFBE,DISTBE,SUBDEFBE
CYCLIC CURRNT,DRIFT
CYCLE 5M
LONG02: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE
CYCLIC CURRNT,DRIFT,INITBE,PDEFBE,SUBDEFBE
CYCLE 5M
MINI02: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE
CYCLIC CURRNT,INITBE
CYCLE 20M
HEIGH1: INITIAL HEIMAP,CURRNT
CYCLIC CURRNT,DRIFT
CYCLE 10M
MASK02: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE
CYCLIC DRIFT,CURRNT CYCLE 4
MASK03: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE
CYCLIC CURRNT,DRIFT
CYCLE 5M
MASK04: INITIAL CURRNT,INITBE,PDEFBE,DISTBE,PDEFBE,SUBDEFBE
CYCLIC CURRNT,DRIFT
CYCLE 5M
MASK05: INITIAL HEIMAP,CURRNT,INITBE,PDEFBE,DISTBE,SUBDEFBE
CYCLIC CURRNT,DRIFT
CYCLE 5M
MASK06: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE
CYCLIC INITBE,PDEFBE,SUBDEFBE,CURRNT,DRIFT
CYCLE 5M
AUTO00: INITIAL CURRNT,INITBE,PDEFBE,DISTBE,PDEFBE,SUBDEFBE
DIRE02: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE
DIRE03: INITIAL CURRNT,INITBE
CYCLIC CURRNT,DRIFT
CYCLE 20M
DIRE04: INITIAL CURRNT,INITBE,PDEFBE
CYCLIC CURRNT
CYCLE 20M
DIRE05: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE
CYCLIC CURRNT
CYCLE 20M
DIRE06: INITIAL CURRNT,INITBE,PDEFBE,DISTBE,SUBDEFBE
CYCLIC CURRNT
CYCLE 20M
DIRE07: INITIAL CURRNT,INITBE,PDEFBE,DISTBE,PDEFBE,SUBDEFBE
CYCLIC CURRNT
CYCLE 20M
DRFT01: INITIAL CURRNT
CYCLIC DRIFT
CYCLE 1
SBG01: INITIAL HEIMAP,CURRNT,INITBE,PDEFBE,SUBDEFBE
SBG02: INITIAL HEIMAP
SBG03: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE
CYCLIC CURRNT,DRIFT
CYCLE 5M
SBG04: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE
CYCLIC CURRNT,DRIFT
CYCLE 5M
SBG05: INITIAL CURRNT
CYCLIC CURRNT,DRIFT
CYCLE 5M
SBG06: INITIAL HEIMAP
CYCLIC CURRNT,DRIFT
CYCLE 5M
SBG07: INITIAL CURRNT
CYCLIC CURRNT,DRIFT
CYCLE 34
TOK01: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE
CYCLIC CURRNT,DRIFT
CYCLE 20M
G5MHA: INITIAL HEIMAP
CYCLIC CURRNT,DRIFT
CYCLE 5M
G5MHB: INITIAL HEIMAP
CYCLIC DRIFT
CYCLE 5M
G5MA: INITIAL CURRNT
CYCLIC CURRNT,DRIFT
CYCLE 5M
G5MB: INITIAL CURRNT
CYCLIC DRIFT
CYCLE 5M
G34HA: INITIAL HEIMAP
CYCLIC CURRNT,DRIFT
CYCLE 34
G34HB: INITIAL HEIMAP
CYCLIC DRIFT
CYCLE 34
G34A: INITIAL CURRNT
CYCLIC CURRNT,DRIFT
CYCLE 34
G34B: INITIAL CURRNT
CYCLIC DRIFT
CYCLE 34
G1HA: INITIAL HEIMAP
CYCLIC CURRNT,DRIFT
CYCLE 1
G1HB: INITIAL HEIMAP
CYCLIC DRIFT
CYCLE 1
G1A: INITIAL CURRNT
CYCLIC CURRNT,DRIFT
CYCLE 1
G1B: INITIAL CURRNT
CYCLIC DRIFT
CYCLE 1
HEICU: INITIAL HEIMAP,CURRNT
HCD: INITIAL HEIMAP
CYCLIC CURRNT,DRIFT CYCLE 30M
CD: INITIAL CURRNT
CYCLIC DRIFT CYCLE 30M
FT01: INITIAL CURRNT
CYCLIC CURRNT,DRIFT CYCLE 5M,F
LONG03: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE
CYCLIC CURRNT,DRIFT,INITBE,PDEFBE,SUBDEFBE
CYCLE 5M,F
HEI: INITIAL HEIMAP
CYCLIC CURRNT
CYCLE 10M
DRF5M: INITIAL CURRNT,HEIMAP
CYCLIC CURRNT,DRIFT CYCLE 5M,F
DTU5M: INITIAL HEIMAP,CURRNT,INITBE,PDEFBE,SUBDEFBE
CYCLIC CURRNT,DRIFT
CYCLE 5M,F
CUR: INITIAL CURRNT
CYCLIC CURRNT
CYCLE 30M