Specific Process Knowledge/Etch/DRIE-Pegasus/DREM: Difference between revisions
No edit summary |
|||
| Line 49: | Line 49: | ||
}} | }} | ||
|} | |} | ||
== Sandbox area below == | |||
{{Template:Peg2TableCColors | |||
|TableHeader=DREM 0.2 kW v2 | |||
}} | |||
{{Template:Peg2TableCAddrowColors | |||
|RecipeName=DREM 0.2kW newMFC | |||
|PriorProcessSteps= | |||
|Keywords= nice! | |||
|PlatenPositionFrequency=HF |StabilisationTime= |StartCycleEndCycle=D/E | |||
|DepositionTime=2.8 |EtchTime=2.6 |NumberOfCycles= | |||
|PressureDepDelay= |PressureDepBoost= |PressureDepMain=100% | |||
|PressureEtchDelay= |PressureEtchBoost= |PressureEtchMain=100% | |||
|SF6-1Dep=0.3@5 |SF6-1Etch= 0.5@15 | |||
|SF6-2Dep= |SF6-2Etch= | |||
|O2Dep= |O2Etch= | |||
|ArDep= |ArEtch= | |||
|N2Dep= |N2Etch= | |||
|HeDep= |HeEtch= | |||
|WCoilDep=0.25 |WCoilEtch=0.25 |WPlatenDep=1 | |||
|WPlatenEtchDelay=0.9@1 |WPlatenEtchBoost=1@20 |WPlatenEtchMain=1 | |||
|%CoilDepLoad=40 |%CoilDepTune=50 |%CoilEtchLoad=40 |%CoilEtchTune=50 | |||
|%PlatenDepLoad=38.2 |%PlatenDepTune=53.8 |%PlatenEtchLoad=38.2 |%PlatenEtchTune=53.8 | |||
|Temperature=0 |BGC-EM-EPD= 5T, NE, NE | |||
|Link2RecipeRun=link2recipt | |||
}} | |||
|} | |||
{{Template:Peg2RecStep1}} | |||
{{Template:Peg2cont1 | {{Template:Peg2cont1 | ||