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Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-4/Slow etch: Difference between revisions

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Bghe (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, Bureaucrats, Administrators
7,318 edits
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<gallery>
File:contour plot for etchrate of slow etch in SiO2.JPG
File:contour plot for etchrate of slow etch in SRN.JPG
</gallery>
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