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NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab347-labadviser-users-35231
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{| border="2" cellspacing="0" cellpadding="10"  
{| border="2" cellspacing="0" cellpadding="10"  
|-
|-
!style="background:silver; color:black;" align="left"|Chemical  
!style="background:silver; color:black;" align="left"|Chemical
!style="background:LightGrey; color:black;"|Concentration  
!style="background:LightGrey; color:black;"|Cas Nr.
!style="background:WhiteSmoke; color:black"|application
!style="background:LightGrey; color:black;"|Concentration
!style="background:LightGrey; color:black;"|Grade
!style="background:WhiteSmoke; color:black"|Comment
!style="background:WhiteSmoke; color:black"|Comment
|-
|-
!style="background:silver; color:black" align="left" valign="top" rowspan="2"|KOH
!style="background:silver; color:black;" align="left"|Acetone
|style="background:LightGrey; color:black"|28%
!style="background:LightGrey; color:black;"|Cas Nr.
|style="background:WhiteSmoke; color:black"|C
!style="background:LightGrey; color:black;"|99,8%-100%
|style="background:WhiteSmoke; color:black"|C
!style="background:LightGrey; color:black;"|Grade
!style="background:WhiteSmoke; color:black"|
|-
|-
|style="background:LightGrey; color:black"|TextB2
!style="background:silver; color:black;" align="left"|Ammoniumhydroxyd
|style="background:WhiteSmoke; color:black"|C
!style="background:LightGrey; color:black;"|Cas Nr.
!style="background:LightGrey; color:black;"|28%
!style="background:LightGrey; color:black;"|Grade
!style="background:WhiteSmoke; color:black"|Comment
|-
!style="background:silver; color:black;" align="left"|Ammoniumperoxodisulfat
!style="background:LightGrey; color:black;"|Cas Nr.
!style="background:LightGrey; color:black;"|98%-99,1%
!style="background:LightGrey; color:black;"|Grade
!style="background:WhiteSmoke; color:black"|Comment
|-
!style="background:silver; color:black;" align="left"|Anisole Anhydrous
!style="background:LightGrey; color:black;"|Cas Nr.
!style="background:LightGrey; color:black;"|99,7%
!style="background:LightGrey; color:black;"|Grade
!style="background:WhiteSmoke; color:black"|Comment
|-
!style="background:silver; color:black;" align="left"|AR-600-546 Developer
!style="background:LightGrey; color:black;"|Cas Nr.
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|Grade
!style="background:WhiteSmoke; color:black"|Comment
|-
!style="background:silver; color:black;" align="left"|AR-600-71 Remover
!style="background:LightGrey; color:black;"|Cas Nr.
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|Grade
!style="background:WhiteSmoke; color:black"|Comment
|-
!style="background:silver; color:black;" align="left"|AR-6200.09 E-beam resist
!style="background:LightGrey; color:black;"|Cas Nr.
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|Grade
!style="background:WhiteSmoke; color:black"|Comment
|-
!style="background:silver; color:black;" align="left"|AZ 351B Developer
!style="background:LightGrey; color:black;"|Cas Nr.
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|Grade
!style="background:WhiteSmoke; color:black"|Comment
|-
!style="background:silver; color:black;" align="left"|AZ 4562 Photoresist
!style="background:LightGrey; color:black;"|Cas Nr.
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|Grade
!style="background:WhiteSmoke; color:black"|Comment
|-
!style="background:silver; color:black;" align="left"|AZ 5214E Photoresist
!style="background:LightGrey; color:black;"|Cas Nr.
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|Grade
!style="background:WhiteSmoke; color:black"|Comment
|-
!style="background:silver; color:black;" align="left"|AZ 726MIF developer
!style="background:LightGrey; color:black;"|Cas Nr.
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|Grade
!style="background:WhiteSmoke; color:black"|Comment
|-
!style="background:silver; color:black;" align="left"|AZ 726MIF developer (Tromle)
!style="background:LightGrey; color:black;"|Cas Nr.
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|Grade
!style="background:WhiteSmoke; color:black"|Comment
|-
!style="background:silver; color:black;" align="left"|AZ MiR 701 (29CPS) Photoresist
!style="background:LightGrey; color:black;"|Cas Nr.
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|Grade
!style="background:WhiteSmoke; color:black"|Comment
|-
!style="background:silver; color:black;" align="left"|AZ nLOF 2020 Photoresist
!style="background:LightGrey; color:black;"|Cas Nr.
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|Grade
!style="background:WhiteSmoke; color:black"|Comment
|-
!style="background:silver; color:black;" align="left"|Boric Acid powder
!style="background:LightGrey; color:black;"|Cas Nr.
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|Grade
!style="background:WhiteSmoke; color:black"|Comment
|-
!style="background:silver; color:black;" align="left"|Chrome etch 18
!style="background:LightGrey; color:black;"|Cas Nr.
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|Grade
!style="background:WhiteSmoke; color:black"|Comment
|-
!style="background:silver; color:black;" align="left"|Developer MIBK Methylisobutylketon 4L
!style="background:LightGrey; color:black;"|Cas Nr.
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|Grade
!style="background:WhiteSmoke; color:black"|Comment
|-
!style="background:silver; color:black;" align="left"|DUV42S-6,4 L ultra nowpak W/Closure lid
!style="background:LightGrey; color:black;"|Cas Nr.
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|Grade
!style="background:WhiteSmoke; color:black"|Comment
|-
!style="background:silver; color:black;" align="left"|Ethanol
!style="background:LightGrey; color:black;"|Cas Nr.
!style="background:LightGrey; color:black;"|99,9%-100%
!style="background:LightGrey; color:black;"|Grade
!style="background:WhiteSmoke; color:black"|Comment
|-
|-
!style="background:silver; color:black" align="left" valign="top" rowspan="2"|Process parameter range
!style="background:silver; color:black;" align="left"|Hydrofluoric acid buffer (BHF/BOE)
|style="background:LightGrey; color:black"|TextC1
!style="background:LightGrey; color:black;"|Cas Nr.
|style="background:WhiteSmoke; color:black"|
!style="background:LightGrey; color:black;"|12,5%
*DetailC1.1
!style="background:LightGrey; color:black;"|Grade
*DetailC1.2
!style="background:WhiteSmoke; color:black"|Comment
*DetailC1.3
|-
|-
|style="background:LightGrey; color:black"|TextC2
!style="background:silver; color:black;" align="left"|Hydrofluoric acid buffer (BHF/BOE W/wetting agent)
|style="background:WhiteSmoke; color:black"|
!style="background:LightGrey; color:black;"|Cas Nr.
*DetailC2.1
!style="background:LightGrey; color:black;"|12,5%
*DetailC2.2
!style="background:LightGrey; color:black;"|Grade
*DetailC2.3
!style="background:WhiteSmoke; color:black"|Comment
|-
|-
!style="background:silver; color:black" align="left" valign="top" rowspan="3"|Substrates
!style="background:silver; color:black;" align="left"|Hexamethyldisilasan
|style="background:LightGrey; color:black"|TextD1
!style="background:LightGrey; color:black;"|Cas Nr.
|style="background:WhiteSmoke; color:black"|
!style="background:LightGrey; color:black;"|not specific
*DetailD1.1
!style="background:LightGrey; color:black;"|Grade
*DetailD1.2
!style="background:WhiteSmoke; color:black"|Comment
*DetailD1.3
|-
|-
|style="background:LightGrey; color:black"|TextD2
!style="background:silver; color:black" align="left" valign="top" rowspan="4"|HYDROFLUORIC ACID (HF)
|style="background:WhiteSmoke; color:black"|
!style="background:LightGrey; color:black;"|Cas Nr.
*DetailD2.1
|style="background:LightGrey; color:black"|1%
*DetailD2.2
!style="background:LightGrey; color:black;"|Grade
*DetailD2.3
|style="background:WhiteSmoke; color:black"|VLSI
|-  
|-
| style="background:LightGrey; color:black"|TextD3
!style="background:LightGrey; color:black;"|Cas Nr.
|style="background:WhiteSmoke; color:black"|
|style="background:LightGrey; color:black"|10%
*DetailD3.1
!style="background:LightGrey; color:black;"|Grade
*DetailD3.2
|style="background:WhiteSmoke; color:black"|VLSI
*DetailD3.3
|-  
|-  
!style="background:LightGrey; color:black;"|Cas Nr.
|style="background:LightGrey; color:black"|40%
!style="background:LightGrey; color:black;"|Grade
|style="background:WhiteSmoke; color:black"|EMSURE® ISO for analysis
|-
!style="background:LightGrey; color:black;"|Cas Nr.
|style="background:LightGrey; color:black"|50%
!style="background:LightGrey; color:black;"|Grade
|style="background:WhiteSmoke; color:black"|VLSI
|-
!style="background:silver; color:black;" align="left"|Hydrochloric acid
!style="background:LightGrey; color:black;"|Cas Nr.
!style="background:LightGrey; color:black;"|37%
!style="background:LightGrey; color:black;"|Grade
!style="background:WhiteSmoke; color:black"|Comment
|-
!style="background:silver; color:black;" align="left"|Hydrogenperoxid
!style="background:LightGrey; color:black;"|Cas Nr.
!style="background:LightGrey; color:black;"|31%
!style="background:LightGrey; color:black;"|Grade
!style="background:WhiteSmoke; color:black"|Comment
|-
!style="background:silver; color:black;" align="left"|KRF m230Y 6cP Gal
!style="background:LightGrey; color:black;"|Cas Nr.
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|Grade
!style="background:WhiteSmoke; color:black"|Comment
|-
!style="background:silver; color:black;" align="left"|KRF M35G 27cP Gal
!style="background:LightGrey; color:black;"|Cas Nr.
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|Grade
!style="background:WhiteSmoke; color:black"|Comment
|-
!style="background:silver; color:black;" align="left"|Microposit Remover 1165
!style="background:LightGrey; color:black;"|Cas Nr.
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|Grade
!style="background:WhiteSmoke; color:black"|Comment
|-
!style="background:silver; color:black;" align="left"|Nitric acid
!style="background:LightGrey; color:black;"|Cas Nr.
!style="background:LightGrey; color:black;"|69%
!style="background:LightGrey; color:black;"|Grade
!style="background:WhiteSmoke; color:black"|Comment
|-
!style="background:silver; color:black;" align="left"|Ortho-Phosphoric acid
!style="background:LightGrey; color:black;"|Cas Nr.
!style="background:LightGrey; color:black;"|85%
!style="background:LightGrey; color:black;"|Grade
!style="background:WhiteSmoke; color:black"|Comment
|-
!style="background:silver; color:black;" align="left"|Potassium hydroxide solution
!style="background:LightGrey; color:black;"|Cas Nr.
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|Grade
!style="background:WhiteSmoke; color:black"|Comment
|-
!style="background:silver; color:black;" align="left"|Propanol
!style="background:LightGrey; color:black;"|Cas Nr.
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|Grade
!style="background:WhiteSmoke; color:black"|Comment
|-
!style="background:silver; color:black;" align="left"|SU-8 2005
!style="background:LightGrey; color:black;"|Cas Nr.
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|Grade
!style="background:WhiteSmoke; color:black"|Comment
|-
!style="background:silver; color:black;" align="left"|SU-8 2035
!style="background:LightGrey; color:black;"|Cas Nr.
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|Grade
!style="background:WhiteSmoke; color:black"|Comment
|-
!style="background:silver; color:black;" align="left"|SU-8 2075
!style="background:LightGrey; color:black;"|Cas Nr.
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|Grade
!style="background:WhiteSmoke; color:black"|Comment
|-
!style="background:silver; color:black;" align="left"|SU-8 Developer (Mr-dev 600)
!style="background:LightGrey; color:black;"|Cas Nr.
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|Grade
!style="background:WhiteSmoke; color:black"|Comment
|-
!style="background:silver; color:black;" align="left"|SU-8 Thinner
!style="background:LightGrey; color:black;"|Cas Nr.
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|Grade
!style="background:WhiteSmoke; color:black"|Comment
|-
!style="background:silver; color:black;" align="left"|Sulfamic acid
!style="background:LightGrey; color:black;"|Cas Nr.
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|Grade
!style="background:WhiteSmoke; color:black"|Comment
|-
!style="background:silver; color:black;" align="left"|Sulfuric acid
!style="background:LightGrey; color:black;"|Cas Nr.
!style="background:LightGrey; color:black;"|95%-97%
!style="background:LightGrey; color:black;"|Grade
!style="background:WhiteSmoke; color:black"|Comment
|-
!style="background:silver; color:black;" align="left"|TI spray
!style="background:LightGrey; color:black;"|Cas Nr.
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|Grade
!style="background:WhiteSmoke; color:black"|Comment
|-
!style="background:silver; color:black;" align="left"|ZED N50
!style="background:LightGrey; color:black;"|Cas Nr.
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|Grade
!style="background:WhiteSmoke; color:black"|Comment
|-
!style="background:silver; color:black;" align="left"|Triton x-100
!style="background:LightGrey; color:black;"|Cas Nr.
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|Grade
!style="background:WhiteSmoke; color:black"|Comment
|-
|}
|}
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