Specific Process Knowledge/Etch/Overview of chemicals: Difference between revisions

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{| border="2" cellspacing="0" cellpadding="10"  
{| border="2" cellspacing="0" cellpadding="10"  
|-
|-
!style="background:silver; color:black;" align="left"|Chemical  
!style="background:silver; color:black;" align="left"|Chemical
!style="background:LightGrey; color:black;"|Concentration  
!style="background:LightGrey; color:black;"|Cas Nr.
!style="background:WhiteSmoke; color:black"|application
!style="background:LightGrey; color:black;"|Concentration
!style="background:LightGrey; color:black;"|Grade
!style="background:WhiteSmoke; color:black"|Comment
!style="background:WhiteSmoke; color:black"|Comment
|-
|-
!style="background:silver; color:black" align="left" valign="top" rowspan="2"|KOH
!style="background:silver; color:black;" align="left"|Acetone
|style="background:LightGrey; color:black"|28%
!style="background:LightGrey; color:black;"|Cas Nr.
|style="background:WhiteSmoke; color:black"|C
!style="background:LightGrey; color:black;"|99,8%-100%
|style="background:WhiteSmoke; color:black"|C
!style="background:LightGrey; color:black;"|Grade
!style="background:WhiteSmoke; color:black"|
|-
|-
|style="background:LightGrey; color:black"|TextB2
!style="background:silver; color:black;" align="left"|Ammoniumhydroxyd
|style="background:WhiteSmoke; color:black"|C
!style="background:LightGrey; color:black;"|Cas Nr.
!style="background:LightGrey; color:black;"|28%
!style="background:LightGrey; color:black;"|Grade
!style="background:WhiteSmoke; color:black"|Comment
|-
!style="background:silver; color:black;" align="left"|Ammoniumperoxodisulfat
!style="background:LightGrey; color:black;"|Cas Nr.
!style="background:LightGrey; color:black;"|98%-99,1%
!style="background:LightGrey; color:black;"|Grade
!style="background:WhiteSmoke; color:black"|Comment
|-
!style="background:silver; color:black;" align="left"|Anisole Anhydrous
!style="background:LightGrey; color:black;"|Cas Nr.
!style="background:LightGrey; color:black;"|99,7%
!style="background:LightGrey; color:black;"|Grade
!style="background:WhiteSmoke; color:black"|Comment
|-
!style="background:silver; color:black;" align="left"|AR-600-546 Developer
!style="background:LightGrey; color:black;"|Cas Nr.
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|Grade
!style="background:WhiteSmoke; color:black"|Comment
|-
!style="background:silver; color:black;" align="left"|AR-600-71 Remover
!style="background:LightGrey; color:black;"|Cas Nr.
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|Grade
!style="background:WhiteSmoke; color:black"|Comment
|-
!style="background:silver; color:black;" align="left"|AR-6200.09 E-beam resist
!style="background:LightGrey; color:black;"|Cas Nr.
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|Grade
!style="background:WhiteSmoke; color:black"|Comment
|-
!style="background:silver; color:black;" align="left"|AZ 351B Developer
!style="background:LightGrey; color:black;"|Cas Nr.
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|Grade
!style="background:WhiteSmoke; color:black"|Comment
|-
!style="background:silver; color:black;" align="left"|AZ 4562 Photoresist
!style="background:LightGrey; color:black;"|Cas Nr.
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|Grade
!style="background:WhiteSmoke; color:black"|Comment
|-
!style="background:silver; color:black;" align="left"|AZ 5214E Photoresist
!style="background:LightGrey; color:black;"|Cas Nr.
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|Grade
!style="background:WhiteSmoke; color:black"|Comment
|-
!style="background:silver; color:black;" align="left"|AZ 726MIF developer
!style="background:LightGrey; color:black;"|Cas Nr.
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|Grade
!style="background:WhiteSmoke; color:black"|Comment
|-
!style="background:silver; color:black;" align="left"|AZ 726MIF developer (Tromle)
!style="background:LightGrey; color:black;"|Cas Nr.
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|Grade
!style="background:WhiteSmoke; color:black"|Comment
|-
!style="background:silver; color:black;" align="left"|AZ MiR 701 (29CPS) Photoresist
!style="background:LightGrey; color:black;"|Cas Nr.
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|Grade
!style="background:WhiteSmoke; color:black"|Comment
|-
!style="background:silver; color:black;" align="left"|AZ nLOF 2020 Photoresist
!style="background:LightGrey; color:black;"|Cas Nr.
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|Grade
!style="background:WhiteSmoke; color:black"|Comment
|-
!style="background:silver; color:black;" align="left"|Boric Acid powder
!style="background:LightGrey; color:black;"|Cas Nr.
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|Grade
!style="background:WhiteSmoke; color:black"|Comment
|-
!style="background:silver; color:black;" align="left"|Chrome etch 18
!style="background:LightGrey; color:black;"|Cas Nr.
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|Grade
!style="background:WhiteSmoke; color:black"|Comment
|-
!style="background:silver; color:black;" align="left"|Developer MIBK Methylisobutylketon 4L
!style="background:LightGrey; color:black;"|Cas Nr.
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|Grade
!style="background:WhiteSmoke; color:black"|Comment
|-
!style="background:silver; color:black;" align="left"|DUV42S-6,4 L ultra nowpak W/Closure lid
!style="background:LightGrey; color:black;"|Cas Nr.
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|Grade
!style="background:WhiteSmoke; color:black"|Comment
|-
!style="background:silver; color:black;" align="left"|Ethanol
!style="background:LightGrey; color:black;"|Cas Nr.
!style="background:LightGrey; color:black;"|99,9%-100%
!style="background:LightGrey; color:black;"|Grade
!style="background:WhiteSmoke; color:black"|Comment
|-
|-
!style="background:silver; color:black" align="left" valign="top" rowspan="2"|Process parameter range
!style="background:silver; color:black;" align="left"|Hydrofluoric acid buffer (BHF/BOE)
|style="background:LightGrey; color:black"|TextC1
!style="background:LightGrey; color:black;"|Cas Nr.
|style="background:WhiteSmoke; color:black"|
!style="background:LightGrey; color:black;"|12,5%
*DetailC1.1
!style="background:LightGrey; color:black;"|Grade
*DetailC1.2
!style="background:WhiteSmoke; color:black"|Comment
*DetailC1.3
|-
|-
|style="background:LightGrey; color:black"|TextC2
!style="background:silver; color:black;" align="left"|Hydrofluoric acid buffer (BHF/BOE W/wetting agent)
|style="background:WhiteSmoke; color:black"|
!style="background:LightGrey; color:black;"|Cas Nr.
*DetailC2.1
!style="background:LightGrey; color:black;"|12,5%
*DetailC2.2
!style="background:LightGrey; color:black;"|Grade
*DetailC2.3
!style="background:WhiteSmoke; color:black"|Comment
|-
|-
!style="background:silver; color:black" align="left" valign="top" rowspan="3"|Substrates
!style="background:silver; color:black;" align="left"|Hexamethyldisilasan
|style="background:LightGrey; color:black"|TextD1
!style="background:LightGrey; color:black;"|Cas Nr.
|style="background:WhiteSmoke; color:black"|
!style="background:LightGrey; color:black;"|not specific
*DetailD1.1
!style="background:LightGrey; color:black;"|Grade
*DetailD1.2
!style="background:WhiteSmoke; color:black"|Comment
*DetailD1.3
|-
|-
|style="background:LightGrey; color:black"|TextD2
!style="background:silver; color:black" align="left" valign="top" rowspan="4"|HYDROFLUORIC ACID (HF)
|style="background:WhiteSmoke; color:black"|
!style="background:LightGrey; color:black;"|Cas Nr.
*DetailD2.1
|style="background:LightGrey; color:black"|1%
*DetailD2.2
!style="background:LightGrey; color:black;"|Grade
*DetailD2.3
|style="background:WhiteSmoke; color:black"|VLSI
|-  
|-
| style="background:LightGrey; color:black"|TextD3
!style="background:LightGrey; color:black;"|Cas Nr.
|style="background:WhiteSmoke; color:black"|
|style="background:LightGrey; color:black"|10%
*DetailD3.1
!style="background:LightGrey; color:black;"|Grade
*DetailD3.2
|style="background:WhiteSmoke; color:black"|VLSI
*DetailD3.3
|-  
|-  
!style="background:LightGrey; color:black;"|Cas Nr.
|style="background:LightGrey; color:black"|40%
!style="background:LightGrey; color:black;"|Grade
|style="background:WhiteSmoke; color:black"|EMSURE® ISO for analysis
|-
!style="background:LightGrey; color:black;"|Cas Nr.
|style="background:LightGrey; color:black"|50%
!style="background:LightGrey; color:black;"|Grade
|style="background:WhiteSmoke; color:black"|VLSI
|-
!style="background:silver; color:black;" align="left"|Hydrochloric acid
!style="background:LightGrey; color:black;"|Cas Nr.
!style="background:LightGrey; color:black;"|37%
!style="background:LightGrey; color:black;"|Grade
!style="background:WhiteSmoke; color:black"|Comment
|-
!style="background:silver; color:black;" align="left"|Hydrogenperoxid
!style="background:LightGrey; color:black;"|Cas Nr.
!style="background:LightGrey; color:black;"|31%
!style="background:LightGrey; color:black;"|Grade
!style="background:WhiteSmoke; color:black"|Comment
|-
!style="background:silver; color:black;" align="left"|KRF m230Y 6cP Gal
!style="background:LightGrey; color:black;"|Cas Nr.
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|Grade
!style="background:WhiteSmoke; color:black"|Comment
|-
!style="background:silver; color:black;" align="left"|KRF M35G 27cP Gal
!style="background:LightGrey; color:black;"|Cas Nr.
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|Grade
!style="background:WhiteSmoke; color:black"|Comment
|-
!style="background:silver; color:black;" align="left"|Microposit Remover 1165
!style="background:LightGrey; color:black;"|Cas Nr.
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|Grade
!style="background:WhiteSmoke; color:black"|Comment
|-
!style="background:silver; color:black;" align="left"|Nitric acid
!style="background:LightGrey; color:black;"|Cas Nr.
!style="background:LightGrey; color:black;"|69%
!style="background:LightGrey; color:black;"|Grade
!style="background:WhiteSmoke; color:black"|Comment
|-
!style="background:silver; color:black;" align="left"|Ortho-Phosphoric acid
!style="background:LightGrey; color:black;"|Cas Nr.
!style="background:LightGrey; color:black;"|85%
!style="background:LightGrey; color:black;"|Grade
!style="background:WhiteSmoke; color:black"|Comment
|-
!style="background:silver; color:black;" align="left"|Potassium hydroxide solution
!style="background:LightGrey; color:black;"|Cas Nr.
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|Grade
!style="background:WhiteSmoke; color:black"|Comment
|-
!style="background:silver; color:black;" align="left"|Propanol
!style="background:LightGrey; color:black;"|Cas Nr.
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|Grade
!style="background:WhiteSmoke; color:black"|Comment
|-
!style="background:silver; color:black;" align="left"|SU-8 2005
!style="background:LightGrey; color:black;"|Cas Nr.
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|Grade
!style="background:WhiteSmoke; color:black"|Comment
|-
!style="background:silver; color:black;" align="left"|SU-8 2035
!style="background:LightGrey; color:black;"|Cas Nr.
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|Grade
!style="background:WhiteSmoke; color:black"|Comment
|-
!style="background:silver; color:black;" align="left"|SU-8 2075
!style="background:LightGrey; color:black;"|Cas Nr.
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|Grade
!style="background:WhiteSmoke; color:black"|Comment
|-
!style="background:silver; color:black;" align="left"|SU-8 Developer (Mr-dev 600)
!style="background:LightGrey; color:black;"|Cas Nr.
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|Grade
!style="background:WhiteSmoke; color:black"|Comment
|-
!style="background:silver; color:black;" align="left"|SU-8 Thinner
!style="background:LightGrey; color:black;"|Cas Nr.
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|Grade
!style="background:WhiteSmoke; color:black"|Comment
|-
!style="background:silver; color:black;" align="left"|Sulfamic acid
!style="background:LightGrey; color:black;"|Cas Nr.
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|Grade
!style="background:WhiteSmoke; color:black"|Comment
|-
!style="background:silver; color:black;" align="left"|Sulfuric acid
!style="background:LightGrey; color:black;"|Cas Nr.
!style="background:LightGrey; color:black;"|95%-97%
!style="background:LightGrey; color:black;"|Grade
!style="background:WhiteSmoke; color:black"|Comment
|-
!style="background:silver; color:black;" align="left"|TI spray
!style="background:LightGrey; color:black;"|Cas Nr.
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|Grade
!style="background:WhiteSmoke; color:black"|Comment
|-
!style="background:silver; color:black;" align="left"|ZED N50
!style="background:LightGrey; color:black;"|Cas Nr.
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|Grade
!style="background:WhiteSmoke; color:black"|Comment
|-
!style="background:silver; color:black;" align="left"|Triton x-100
!style="background:LightGrey; color:black;"|Cas Nr.
!style="background:LightGrey; color:black;"|not specific
!style="background:LightGrey; color:black;"|Grade
!style="background:WhiteSmoke; color:black"|Comment
|-
|}
|}

Revision as of 11:31, 15 November 2022

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Chemical Cas Nr. Concentration Grade Comment
Acetone Cas Nr. 99,8%-100% Grade
Ammoniumhydroxyd Cas Nr. 28% Grade Comment
Ammoniumperoxodisulfat Cas Nr. 98%-99,1% Grade Comment
Anisole Anhydrous Cas Nr. 99,7% Grade Comment
AR-600-546 Developer Cas Nr. not specific Grade Comment
AR-600-71 Remover Cas Nr. not specific Grade Comment
AR-6200.09 E-beam resist Cas Nr. not specific Grade Comment
AZ 351B Developer Cas Nr. not specific Grade Comment
AZ 4562 Photoresist Cas Nr. not specific Grade Comment
AZ 5214E Photoresist Cas Nr. not specific Grade Comment
AZ 726MIF developer Cas Nr. not specific Grade Comment
AZ 726MIF developer (Tromle) Cas Nr. not specific Grade Comment
AZ MiR 701 (29CPS) Photoresist Cas Nr. not specific Grade Comment
AZ nLOF 2020 Photoresist Cas Nr. not specific Grade Comment
Boric Acid powder Cas Nr. not specific Grade Comment
Chrome etch 18 Cas Nr. not specific Grade Comment
Developer MIBK Methylisobutylketon 4L Cas Nr. not specific Grade Comment
DUV42S-6,4 L ultra nowpak W/Closure lid Cas Nr. not specific Grade Comment
Ethanol Cas Nr. 99,9%-100% Grade Comment
Hydrofluoric acid buffer (BHF/BOE) Cas Nr. 12,5% Grade Comment
Hydrofluoric acid buffer (BHF/BOE W/wetting agent) Cas Nr. 12,5% Grade Comment
Hexamethyldisilasan Cas Nr. not specific Grade Comment
HYDROFLUORIC ACID (HF) Cas Nr. 1% Grade VLSI
Cas Nr. 10% Grade VLSI
Cas Nr. 40% Grade EMSURE® ISO for analysis
Cas Nr. 50% Grade VLSI
Hydrochloric acid Cas Nr. 37% Grade Comment
Hydrogenperoxid Cas Nr. 31% Grade Comment
KRF m230Y 6cP Gal Cas Nr. not specific Grade Comment
KRF M35G 27cP Gal Cas Nr. not specific Grade Comment
Microposit Remover 1165 Cas Nr. not specific Grade Comment
Nitric acid Cas Nr. 69% Grade Comment
Ortho-Phosphoric acid Cas Nr. 85% Grade Comment
Potassium hydroxide solution Cas Nr. not specific Grade Comment
Propanol Cas Nr. not specific Grade Comment
SU-8 2005 Cas Nr. not specific Grade Comment
SU-8 2035 Cas Nr. not specific Grade Comment
SU-8 2075 Cas Nr. not specific Grade Comment
SU-8 Developer (Mr-dev 600) Cas Nr. not specific Grade Comment
SU-8 Thinner Cas Nr. not specific Grade Comment
Sulfamic acid Cas Nr. not specific Grade Comment
Sulfuric acid Cas Nr. 95%-97% Grade Comment
TI spray Cas Nr. not specific Grade Comment
ZED N50 Cas Nr. not specific Grade Comment
Triton x-100 Cas Nr. not specific Grade Comment
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