Specific Process Knowledge/Etch/Overview of chemicals: Difference between revisions

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!style="background:WhiteSmoke; color:black"|Comment
!style="background:WhiteSmoke; color:black"|Comment
|-
|-
!style="background:silver; color:black" align="left" valign="top" rowspan="2"|Performance
!style="background:silver; color:black" align="left" valign="top" rowspan="2"|KOH
|style="background:LightGrey; color:black"|TextB1
|style="background:LightGrey; color:black"|TextB1
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|C
*DetailB1.1
*DetailB1.2
*DetailB1.3
|-
|-
|style="background:LightGrey; color:black"|TextB2
|style="background:LightGrey; color:black"|TextB2
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|C
*DetailB2.1
*DetailB2.2
*DetailB2.3
|-
|-
!style="background:silver; color:black" align="left" valign="top" rowspan="2"|Process parameter range
!style="background:silver; color:black" align="left" valign="top" rowspan="2"|Process parameter range

Revision as of 08:27, 5 October 2022

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Chemical Concentration Comment
KOH TextB1 C
TextB2 C
Process parameter range TextC1
  • DetailC1.1
  • DetailC1.2
  • DetailC1.3
TextC2
  • DetailC2.1
  • DetailC2.2
  • DetailC2.3
Substrates TextD1
  • DetailD1.1
  • DetailD1.2
  • DetailD1.3
TextD2
  • DetailD2.1
  • DetailD2.2
  • DetailD2.3
TextD3
  • DetailD3.1
  • DetailD3.2
  • DetailD3.3
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