Specific Process Knowledge/Etch/Aluminum Oxide/Al2O3 Etch with ICP Metal: Difference between revisions

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==Al2O3 etching by sanvis@nanolab [[Image:section under construction.jpg|70px]]==
==Al2O3 etching by sanvis@nanolab [[Image:section under construction.jpg|70px]]==
{| border="1" cellspacing="2" cellpadding="2"
|-style="background:Black; color:White"
! Parameter
|Nanoscale Al2O3 etch
|Microscale Al2O3 etch
|-
|Coil Power [W]
|300
|500
|-
|Platen Power [W]
|15
|70
|-
|Platen temperature [<sup>o</sup>C]
|0
|0
|-
|BCl3 flow [sccm]
|20
|40
|-
|Cl<sub>2</sub> flow [sccm]
|7
|15
|-
|Pressure [mTorr]
|1.2
|3.0
|-
|}
{| border="2" cellspacing="2" cellpadding="3"
|-style="background:DarkGray; color:White"
!Material to be etched
!Nanoscale Al2O3 etch
!Microscale Al2O3 etch
|-
|Etch rate
|'''6.25 nm/min on 6" wafer''',  ''Summer sanvis@nanolab''
|'''25 nm/min on small samples on Si carrier''', ''Summer sanvis@nanolab''
|-
|}
<br clear="all" />


==Al2O3 etching by bghe@nanolab==
==Al2O3 etching by bghe@nanolab==

Revision as of 13:38, 30 September 2022

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Al2O3 etching with the ICP metal

Parameter Recipe name: no name (testing recipe)
Coil Power [W] 1200
Platen Power [W] 200
Platen temperature [oC] 0
BCl3 flow [sccm] 60
Cl2 flow [sccm] 30
Pressure [mTorr] 4


Material to be etched Etch rate using the above parameters
Al2O3
  • ~93nm/min (30s, 1/4 wafer on 6" carrier)
    2017-01-20 bghe@nanolab


Al2O3 etching by sanvis@nanolab

Parameter Nanoscale Al2O3 etch Microscale Al2O3 etch
Coil Power [W] 300 500
Platen Power [W] 15 70
Platen temperature [oC] 0 0
BCl3 flow [sccm] 20 40
Cl2 flow [sccm] 7 15
Pressure [mTorr] 1.2 3.0


Material to be etched Nanoscale Al2O3 etch Microscale Al2O3 etch
Etch rate 6.25 nm/min on 6" wafer, Summer sanvis@nanolab 25 nm/min on small samples on Si carrier, Summer sanvis@nanolab


Al2O3 etching by bghe@nanolab

Recipes

Al2O3 etch
Parameter Recipe 1:Al2O3 etch platen only
BCl3 (sccm) 15
Ar (sccm) 15
Pressure (mTorr) 5
Coil power (W) 0
Platen power (W) 30
Temperature (oC) 20
Spacers (mm) 100 mm

Results

  • Profile view
  • Top view after resist strip
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