Specific Process Knowledge/Etch/ICP Metal Etcher/Chromium: Difference between revisions
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<gallery caption="After Cr etch 75s with recipe 13 and nitride etch in the AOE 20s" widths="500px" heights="500px" perrow="2"> | |||
Image:Cr-75s_sin-met-20s_0733.jpg | |||
</gallery> | |||
==Chromium etch in ICP metal on a thick glass substrate== | ==Chromium etch in ICP metal on a thick glass substrate== | ||