Specific Process Knowledge/Thin film deposition/Deposition of Silicon Nitride: Difference between revisions
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*Si<sub>3</sub>N<sub>4</sub> | *Si<sub>3</sub>N<sub>4</sub> | ||
*SRN | *SRN | ||
SRN: Silicon | SRN: Silicon Rich Nitride | ||
| | | | ||
*Si<sub>x</sub>N<sub>y</sub>H<sub>z</sub> | *Si<sub>x</sub>N<sub>y</sub>H<sub>z</sub> | ||