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Specific Process Knowledge/Lithography/EBeamLithography: Difference between revisions

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|[http://www.allresist.com AllResist]
|[http://www.allresist.com AllResist]
|Both e-beam, DUV and UV-sensitive resist.
|Both e-beam, DUV and UV-sensitive resist.
|[[media:ARN7500.pdf‎|ARN7500.pdf‎]]
|[https://www.allresist.com/wp-content/uploads/sites/2/2020/03/AR-N7500_english_Allresist_product-information.pdf AR-N 7500 info]
|Labspin 2/3
|Labspin 2/3
|PGMEA
|PGMEA