Specific Process Knowledge/Lithography/EBeamLithography: Difference between revisions
Appearance
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|[http://www.allresist.com AllResist] | |[http://www.allresist.com AllResist] | ||
|Both e-beam, DUV and UV-sensitive resist. | |Both e-beam, DUV and UV-sensitive resist. | ||
|[ | |[https://www.allresist.com/wp-content/uploads/sites/2/2020/03/AR-N7500_english_Allresist_product-information.pdf AR-N 7500 info] | ||
|Labspin 2/3 | |Labspin 2/3 | ||
|PGMEA | |PGMEA | ||