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== Proximity Error Correction (PEC) in BEAMER ==
== Proximity Error Correction (PEC) in BEAMER ==


[[Image:BEAMER_PEC.png|frame|400x400px|right]]
[[Image:BEAMER_PEC.jpg|500x500px|thumb|Example of dose modulated design file after Proximity Error Correction.]]


BEAMER is endowed with a software that corrects for proximity errors in the e-beam exposure. You can read more about this function in the BEAMER manual [[Specific_Process_Knowledge/Lithography/EBeamLithography/BEAMER|here]] and in the BEAMER presentation here [[media:BEAMERPresentation.pdf‎|BEAMERPresentation.pdf‎]].
BEAMER is endowed with a software that corrects for proximity errors in the e-beam exposure. You can read more about this function in the BEAMER manual [[Specific_Process_Knowledge/Lithography/EBeamLithography/BEAMER|here]] and in the BEAMER presentation here [[media:BEAMERPresentation.pdf‎|BEAMERPresentation.pdf‎]].
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