Specific Process Knowledge/Thermal Process/Oxidation/Dry oxidation C1 furnace: Difference between revisions
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The graph below shows the measured oxide thickness as function of the wafer slot. Slot 1 is furthest inside the furnace, towards the service area. For each wafer the oxide thickness has been measured in 49 points, and the average oxide thickness has been calculated. | The graph below shows the measured oxide thickness as function of the wafer slot. Slot 1 is furthest inside the furnace, towards the service area. For each wafer the oxide thickness has been measured in 49 points, and the average oxide thickness has been calculated. | ||
[[image: | [[image:C1thickness-vs-slot.jpg|450x450px|left|thumb|xxx]] | ||
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