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Specific Process Knowledge/Thin film deposition/PECVD: Difference between revisions

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Bghe (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, Bureaucrats, Administrators
7,318 edits
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*Silicon oxynitride
*Silicon oxynitride
*BPSG (Boron Phosphorous doped Silica Glass)
*BPSG (Boron Phosphorous doped Silica Glass)
*aSi
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*Silicon oxide
*Silicon oxide
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