Specific Process Knowledge/Thermal Process/Oxidation/Dry oxidation C1 furnace: Difference between revisions

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	The graph below shows the measured oxide thickness as function of the wafer slot. Slot 1 is furthest inside the furnace, towards the service area.		The graph below shows the measured oxide thickness as function of the wafer slot. Slot 1 is furthest inside the furnace, towards the service area.

	The oxidation and measurements were done by Martin Ommen (former DTU Nanotech).		''The oxidation and measurements were done by Martin Ommen (former DTU Nanotech).''