Specific Process Knowledge/Thin film deposition/Temescal/Acceptance Test: Difference between revisions
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The thickness uniformity was not tested for the 8" sample holder nor for the tilted sample holder. | The thickness uniformity was not tested for the 8" sample holder nor for the tilted sample holder. | ||
We cannot guarantee that the batch-to-batch thickness reproducibility will always be below 3 % as there may be more drift over longer times. We check the thickness of a Ti/Au deposition every month and ensure that it is within 10 % of the expected value and | We cannot guarantee that the batch-to-batch thickness reproducibility will always be below 3 % as there may be more drift over longer times. We check the thickness of a Ti/Au deposition every month and ensure that it is within 10 % of the expected value and in most cases the variation has been much less than 10 %. You can see the deviation over time in the QC data which is found in LabManager under Documents or ask staff for the detailed data. | ||
== Sheet resistance uniformity == | == Sheet resistance uniformity == | ||