Specific Process Knowledge/Lithography/EBeamLithography/eLINE: Difference between revisions
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{| border="2" cellspacing="1" cellpadding="1" align="center" | {| border="2" cellspacing="1" cellpadding="1" align="center" | ||
! style="background:silver; color:black" colspan="4" | | ! style="background:silver; color:black" colspan="4" | Area dose [µC/cm2] | ||
|- valign="top" | |- valign="top" | ||
! style="background:silver; color:black" | Acc. voltage | ! style="background:silver; color:black" | Acc. voltage | ||