Specific Process Knowledge/Lithography/EBeamLithography/eLINE: Difference between revisions
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We recommend all EBL users to do a dose test prior to exposing samples of significant value. As a starting point you can consider to use the Demo.csf provided on the tool. This pattern is available in the auto generated user folder. The pattern consist of areas, curved elements, lines and dots as shown below. | We recommend all EBL users to do a dose test prior to exposing samples of significant value. As a starting point you can consider to use the Demo.csf provided on the tool. This pattern is available in the auto generated user folder. The pattern consist of areas, curved elements, lines and dots as shown below. Notice that several elements of the design are dose modulated, i.e. they can cover a range of doses in a single exposure. | ||
[[Image:DoseChip6.png|300x300px|right|thumb|Overview image of the dose test design provided on the tool.]] | [[Image:DoseChip6.png|300x300px|right|thumb|Overview image of the dose test design provided on the tool.]] | ||
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==Typical beam currents== | ==Typical beam currents== | ||