Specific Process Knowledge/Etch/ICP Metal Etcher/silicon: Difference between revisions
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== Silicon etching on the ICP Metal Etcher == | == Silicon etching on the ICP Metal Etcher == | ||
Revision as of 10:08, 9 August 2022
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Silicon etching on the ICP Metal Etcher
In the primary silicon etcher at Nanolab, the DRIE-Pegasus, silicon is etched using a fluorine based plasma (with SF6 as etch gas). Silicon is also etched by chlorine and bromine.