Specific Process Knowledge/Etch/DRIE-Pegasus: Difference between revisions
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* 5KW 13.56MHz RF power supply and fast acting matching unit | * 5KW 13.56MHz RF power supply and fast acting matching unit | ||
* Low notching Silicon On Insulator (SOI) capability | * Low notching Silicon On Insulator (SOI) capability | ||
* MACS (Multiplex Atmospheric Cassette | * MACS (Multiplex Atmospheric Cassette System) | ||
2.2 Wafer requirements | 2.2 Wafer requirements | ||