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Specific Process Knowledge/Lithography/EBeamLithography/eLINE: Difference between revisions

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Thope (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab347-labadviser-users-35231
2,178 edits
Thope (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab347-labadviser-users-35231
2,178 edits
Line 44: Line 44:
|- valign="top"
|- valign="top"
! style="background:lightgrey; color:black" | 20 kV
! style="background:lightgrey; color:black" | 20 kV
| style="background:lightgrey; color:black" |  
| style="background:lightgrey; color:black" | 0.02
| style="background:lightgrey; color:black" |  
| style="background:lightgrey; color:black" | 0.04
| style="background:lightgrey; color:black" |  
| style="background:lightgrey; color:black" | 0.09
| style="background:lightgrey; color:black" |  
| style="background:lightgrey; color:black" | 0.16
| style="background:lightgrey; color:black" |  
| style="background:lightgrey; color:black" | 0.36
| style="background:lightgrey; color:black" |  
| style="background:lightgrey; color:black" | 1.53
| style="background:lightgrey; color:black" |  
| style="background:lightgrey; color:black" | 6.06
|- valign="top"
|- valign="top"
! style="background:Whitesmoke; color:black" | 20 kV HC
! style="background:Whitesmoke; color:black" | 20 kV HC
| style="background:WhiteSmoke; color:black"|  
| style="background:WhiteSmoke; color:black"| 0.03
| style="background:WhiteSmoke; color:black"|  
| style="background:WhiteSmoke; color:black"| 0.08
| style="background:WhiteSmoke; color:black"|  
| style="background:WhiteSmoke; color:black"| 0.18
| style="background:WhiteSmoke; color:black"|   
| style="background:WhiteSmoke; color:black"|  0.32
| style="background:WhiteSmoke; color:black"|   
| style="background:WhiteSmoke; color:black"|  0.61
| style="background:WhiteSmoke; color:black"|  
| style="background:WhiteSmoke; color:black"| 3.03
| style="background:WhiteSmoke; color:black"|  
| style="background:WhiteSmoke; color:black"| 11.9
|- valign="top"
|- valign="top"
! style="background:lightgrey; color:black" | 30 kV
! style="background:lightgrey; color:black" | 30 kV
| style="background:lightgrey; color:black" |  
| style="background:lightgrey; color:black" | 0.02
| style="background:lightgrey; color:black" |  
| style="background:lightgrey; color:black" | 0.04
| style="background:lightgrey; color:black" |  
| style="background:lightgrey; color:black" | 0.10
| style="background:lightgrey; color:black" |  
| style="background:lightgrey; color:black" | 0.17
| style="background:lightgrey; color:black" |  
| style="background:lightgrey; color:black" | 0.38
| style="background:lightgrey; color:black" |  
| style="background:lightgrey; color:black" | 1.65
| style="background:lightgrey; color:black" |  
| style="background:lightgrey; color:black" | 6.53
|- valign="top"
|- valign="top"
! style="background:Whitesmoke; color:black" | 30 kV HC
! style="background:Whitesmoke; color:black" | 30 kV HC
| style="background:WhiteSmoke; color:black"|  
| style="background:WhiteSmoke; color:black"| 0.04
| style="background:WhiteSmoke; color:black"|  
| style="background:WhiteSmoke; color:black"| 0.09
| style="background:WhiteSmoke; color:black"|  
| style="background:WhiteSmoke; color:black"| 0.19
| style="background:WhiteSmoke; color:black"|   
| style="background:WhiteSmoke; color:black"|  0.34
| style="background:WhiteSmoke; color:black"|   
| style="background:WhiteSmoke; color:black"|  0.64
| style="background:WhiteSmoke; color:black"|  
| style="background:WhiteSmoke; color:black"| 3.20
| style="background:WhiteSmoke; color:black"|  
| style="background:WhiteSmoke; color:black"| 12.6
|}
|}


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