Specific Process Knowledge/Lithography/EBeamLithography/eLINE: Difference between revisions
Appearance
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| style="background:WhiteSmoke; color:black"| 1.96 | | style="background:WhiteSmoke; color:black"| 1.96 | ||
| style="background:WhiteSmoke; color:black"| 7.67 | | style="background:WhiteSmoke; color:black"| 7.67 | ||
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! style="background:lightgrey; color:black" | 20 kV | |||
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! style="background:Whitesmoke; color:black" | 20 kV HC | |||
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|- valign="top" | |||
! style="background:lightgrey; color:black" | 30 kV | |||
| style="background:lightgrey; color:black" | | |||
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| style="background:lightgrey; color:black" | | |||
| style="background:lightgrey; color:black" | | |||
| style="background:lightgrey; color:black" | | |||
| style="background:lightgrey; color:black" | | |||
|- valign="top" | |||
! style="background:Whitesmoke; color:black" | 30 kV HC | |||
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|} | |} | ||