Specific Process Knowledge/Lithography/EBeamLithography/eLINE: Difference between revisions
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! style="background:orange; color:black" colspan="8" | Typical beam current [ | ! style="background:orange; color:black" colspan="8" | Typical beam current [nA] as function of acceleration voltage and aperture | ||
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! style="background:silver; color:black" | Acc. voltage / Aperture | ! style="background:silver; color:black" | Acc. voltage / Aperture | ||