Specific Process Knowledge/Etch/DRIE-Pegasus: Difference between revisions
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1.5 Purpose | 1.5 Purpose | ||
The DRIE-Pegasus etch tool is a state-of-the-art silicon etch tool. | The DRIE-Pegasus etch tool is a state-of-the-art silicon etch tool. The combination of advanced hardware and software enables you to either use the optimized standard processes or to tailor etch processes for your specific needs. | ||
1.6 Overview of equipment | 1.6 Overview of equipment | ||
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2 Technical specifications | 2 Technical specifications | ||