Specific Process Knowledge/Lithography/EBeamLithography/eLINE: Difference between revisions
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! style="background:lightgrey; color:black" | 10 kV | ! style="background:lightgrey; color:black" | 10 kV | ||
| style="background:lightgrey; color:black" | 30 | | style="background:lightgrey; color:black" | 30 | ||
| style="background:lightgrey; color:black" | | | style="background:lightgrey; color:black" | - | ||
| style="background:lightgrey; color:black" | | | style="background:lightgrey; color:black" | - | ||
|- valign="top" | |- valign="top" | ||
! style="background:Whitesmoke; color:black" | 20 kV | ! style="background:Whitesmoke; color:black" | 20 kV | ||
! style="background:WhiteSmoke; color:black" | 70 | ! style="background:WhiteSmoke; color:black" | 70 | ||
| style="background:WhiteSmoke; color:black"| | | style="background:WhiteSmoke; color:black"| - | ||
| style="background:WhiteSmoke; color:black"| | | style="background:WhiteSmoke; color:black"| - | ||
|- valign="top" | |- valign="top" | ||
! style="background:lightgrey; color:black" | 30 kV | ! style="background:lightgrey; color:black" | 30 kV | ||
| style="background:lightgrey; color:black" | 100 | | style="background:lightgrey; color:black" | 100 | ||
| style="background:lightgrey; color:black" | | | style="background:lightgrey; color:black" | - | ||
| style="background:lightgrey; color:black" | 180 | | style="background:lightgrey; color:black" | 180 | ||