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Specific Process Knowledge/Lithography/Baking: Difference between revisions

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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, danchip
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Jehem (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, danchip
1,871 edits
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![[Specific_Process_Knowledge/Lithography/Baking#Hotplate:_90-110C|Hotplate: 90-110C]]
![[Specific_Process_Knowledge/Lithography/Baking#Hotplate:_90-110C|Hotplate: 90-110C]]
![[Specific_Process_Knowledge/Lithography/Baking#Hotplate_1_.28SU8.29.2C_Hotplate_2_.28SU8.29.2C_Hoplate_3.28SU8.29_and_Hotplate_4.28SU8.29|Hotplate 1, 2 and 3 (SU8)]]
![[Specific_Process_Knowledge/Lithography/Baking#Hotplate_1_.28SU8.29.2C_Hotplate_2_.28SU8.29.2C_Hoplate_3.28SU8.29_and_Hotplate_4.28SU8.29|SU8 hotplates 1, 2 and 3]]
![[Specific Process Knowledge/Lithography/Baking#Small_benchtop_hotplates|Small benchtop hotplates]]
![[Specific Process Knowledge/Lithography/Baking#Small_benchtop_hotplates|Small benchtop hotplates]]
![[Specific Process Knowledge/Lithography/Baking#Gamma_hotplates|Gamma hotplates]]
![[Specific Process Knowledge/Lithography/Baking#Gamma_hotplates|Gamma hotplates]]
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*PEB of SU-8
*PEB of SU-8
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Hotplate: 90-110C:<br />
Programmable, contact bake
*Soft bake
*PEB
Labspin hotplates:<br />
Adjustable temperature, contact bake
Adjustable temperature, contact bake
*Soft bake
*Soft bake
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Maximum 110°C
Maximum 110°C
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Maximum temperature is hotplate dependent
Hotplate: 90-110C:<br />
*Maximum 120°C
*Return to 90°C after use
 


With top-plate: Actual surface temperature = 0.9 * display value
Labspin hotplates:<br />
*Maximum temperature is hotplate dependent
*Temperature with top-plate: Actual surface temperature = 0.9 * display value
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Fixed at various recipe dependent temperatures
Fixed at various recipe dependent temperatures
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* 200 mm wafer
* 200 mm wafer
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* pieces
* pieces (only Labspin hotplates)
* 50 mm wafers
* 50 mm wafers
* 100 mm wafers
* 100 mm wafers
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https://labmanager.dtu.dk/view_binary.php?type=data&mach=336  
Hotplate: 90-110C:<br /> https://labmanager.dtu.dk/view_binary.php?type=data&mach=336
 
Spin coater: Labspin 02:<br />https://labmanager.dtu.dk/view_binary.php?type=data&mach=362
 
Spin coater: Labspin 03:<br />https://labmanager.dtu.dk/view_binary.php?type=data&mach=387


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