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Specific Process Knowledge/Thin film deposition/Deposition of ITO: Difference between revisions

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We have acquired a lot of knowledge about ITO deposition in our Cluster Lesker system, and results are summarized on a page here:
We have acquired a lot of knowledge about ITO deposition in our Cluster Lesker system, and results are summarized on a page here:


*[[Specific_Process_Knowledge/Thin_film_deposition/Sputtering of ITO in Sputter-System Metal-Oxide (PC1)|Sputtering of ITO in Sputter-System Metal-Oxide (PC1)]].
*[[Specific_Process_Knowledge/Thin_film_deposition/Deposition of ITO/Sputtering of ITO in Sputter-System Metal-Oxide (PC1)|Sputtering of ITO in Sputter-System Metal-Oxide (PC1)]].


==Comparison of the methods for deposition of ITO==
==Comparison of the methods for deposition of ITO==
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