Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 02 processing: Difference between revisions
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'''Speed vs. dose:''' | '''Speed vs. dose:''' | ||
The writing speed remains almost constant up to a dose of 1000mJ/cm<sup>2</sup>. Due to the higher power of the 405nm laser, the writing speed remains high up to a dose of 2000mJ/cm<sup>2</sup> for this wavelength. After this point, the writing speed decreases almost linearly with dose. For 375nm, the writing speed is 50% at a dose of 4500mJ/cm<sup>2</sup>, while 405nm requires a dose of 8500mJ/cm<sup>2</sup> to drop to that speed. | The writing speed remains almost constant up to a dose of 1000mJ/cm<sup>2</sup>. Due to the higher power of the 405nm laser, the writing speed remains high up to a dose of 2000mJ/cm<sup>2</sup> for this wavelength <span style="color:red">(July 2022: Using the 405 nm laser is not allowed)</span>. After this point, the writing speed decreases almost linearly with dose. For 375nm, the writing speed is 50% at a dose of 4500mJ/cm<sup>2</sup>, while 405nm requires a dose of 8500mJ/cm<sup>2</sup> to drop to that speed. | ||
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