Specific Process Knowledge/Back-end processing/Disco Saw: Difference between revisions
Appearance
| Line 132: | Line 132: | ||
===Comparing dicing parameters for different materials '''DAD 321'''=== | ===Comparing dicing parameters for different materials '''DAD 321'''=== | ||
Do not mix blades for the DAD 321 with the blades for the DAD 3241. They have different outer diameters | |||
{| border="2" cellspacing="0" cellpadding="4" align="center" | {| border="2" cellspacing="0" cellpadding="4" align="center" | ||
| Line 161: | Line 163: | ||
This leaves 125µm uncut since blue tape is 75µm.<br> | This leaves 125µm uncut since blue tape is 75µm.<br> | ||
It is possible to cut through the sample. | It is possible to cut through the sample. | ||
|-valign="top" | |||
|'''Max. sample thickness''' | |||
|1.5 mm | |||
|2.0 mm | |||
|- | |||
|} | |||
===Comparing dicing parameters for different materials '''DAD 3241'''=== | |||
Do not mix blades for the DAD 321 with the blades for the DAD 3241. They have different outer diameters | |||
{| border="2" cellspacing="0" cellpadding="4" align="center" | |||
! | |||
!Silicon | |||
!Other materials | |||
|- valign="top" | |||
|'''Bladetype''' | |||
|HUB Blade | |||
|ASK! (HUBless) | |||
|-valign="top" | |||
|'''Blade width''' | |||
|50 µm | |||
|ask | |||
|-valign="top" | |||
|'''Cutlinewidth''' | |||
|50 µm | |||
|ask | |||
|-valign="top" | |||
|'''Recommended feed speed''' | |||
|Up to 40 mm/sec | |||
|ask | |||
|-valign="top" | |||
|'''Recommended dice depth''' | |||
|We usually cut all way through the wafer with a blade height of 50µm (preferred).<br> | |||
|ask! | |||
|-valign="top" | |-valign="top" | ||
|'''Max. sample thickness''' | |'''Max. sample thickness''' | ||