Specific Process Knowledge/Thin film deposition/Deposition of Silicon Oxide/Deposition of Silicon Oxide using Lesker sputter tool: Difference between revisions
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==Oxide insulation analysis== | ===Oxide insulation analysis=== | ||
''by Bjarke Thomas Dalslet @Nanotech.dtu.dk'' | ''by Bjarke Thomas Dalslet @Nanotech.dtu.dk'' | ||