Specific Process Knowledge/Characterization/Profiler: Difference between revisions

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 ==Stylus Profiler (Tencor P17) ==
-The P17 Stylus Profiler from KLA Tencor is used in a similar manner to the Dektak XTA for profiling surfaces with structures in the micro- and submicrometer range as well as stress and roughness measurements and 3D maps made up of many parallel lines.
+The P17 Stylus Profiler from KLA Tencor is used in a similar manner to the Dektak XTA for profiling surfaces with structures in the micro- and submicrometer range as well as for measuring [[Specific_Process_Knowledge/Characterization/Stress_measurement|stress]]. Compared to the DektakXT, the P17 has more advanced options for stress measurements and allows the user to measure a stress map with up to 5° radial resolution. Programming a sequence of predefined scans in fixed locations on a wafer is also somewhat easier and the manual for doing it much better for the P17 than for the Dektak XTA. A disadvantage of the P17 is that is can be hard to locate structures as the maximum field of view of the camera is 1x1.5 mm. We recommend having a map of the sample design available so you can easily locate the features of interest. Otherwise the P17 is easy to use, fast, and accurate, just like the DektakXT.
-Compared to the DektakXT, the P17 has more advanced options for [[Specific_Process_Knowledge/Characterization/Stress_measurement|stress measurements]] and allows the user to measure a stress map with down to 5° radial resolution. Programming a sequence of predefined scans is also somewhat easier and the manual for doing it much better for the P17 than for the Dektak XTA. A disadvantage of the P17 is that is can be hard to locate the structures one wants to measure as the maximum field of view of the camera is 1x1.5 mm. We recommend knowing your sample well or having a picture of the sample design available so you can easily locate the features of interest. Otherwise the P17 is easy to use, fast and accurate, just like the DektakXT.
 '''The user manual, quality control procedure and results, technical information and contact information can be found in LabManager:'''
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 |style="background:LightGrey; color:black"|Height accuracy z (95 % confidence)
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-On the order of 17 nm for the smallest range for a 1 micron step and 0.2 micron for the larger ranges for a 25 micron step '''for well-defined steps that are easy to measure''', see section above.
+~ 2 % for the smallest range for a 1 micron step and ~ 1 % for a 25 micron step '''for well-defined steps that are easy to measure''', see section above.
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 |style="background:LightGrey; color:black"|Max scan depth as a function of trench width W
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 ===Height measurement accuracy for the Tencor P17 Stylus Profiler===
-This is similar to what applies to the DektakXT as described above. The P17 has slightly better reproducibility but as the uncertainty for small steps is dominated by the uncertainty on the standard step height's actual size, this does not make much difference. For the larger ranges the uncertainty is similar to that of the intermediate ranges of the DektakXT. Note that just as for the Dektak, the reproducibility of your own measurements of your particular step can make a relatively large contribution to the total uncertainty, Steps in real devices are not always as easy to measure or as well defined as our standard step height measurements.
+This is similar to what applies to the DektakXT as described above. The P17 has slightly better reproducibility but as the uncertainty for small steps is dominated by the uncertainty on the standard step height's actual size, this does not make much difference. Just as for the Dektak, the reproducibility of your own measurements of your particular step can make a relatively large contribution to the total uncertainty, Steps in real devices are not always as easy to measure or as well defined as our standard step height measurements.
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