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Specific Process Knowledge/Lithography/EBeamLithography/eLINE: Difference between revisions

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==Typical beam currents==
Beam current is a function of acceleration voltage and aperture and thus beam current is locked by the choice of acceleration voltage and aperture. Typical beam currents are given in the table
[[Image:CurrentAperture.png|500x500px|right|thumb|Overview image of the dose test design provided on the tool.]]
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