Specific Process Knowledge/Lithography/EBeamLithography/eLINE: Difference between revisions
| Line 14: | Line 14: | ||
[[File:eLINE-Areas.png]] | [[File:eLINE-Areas.png]] | ||
Dot dose, line dose and curved element doses can be disabled in the Patterning Parameter window and in that case the system will only operate with an area dose. | Dot dose, line dose and curved element doses can be disabled in the Patterning Parameter window and in that case the system will only operate with an area dose. | ||
We recommend all EBL users to do a dose test prior to exposing samples of significant value. As a starting point for you can consider to use the Demo.csf provided on the tool. This pattern is available in the auto generated user folder. The pattern consist of areas, curved elements, lines and dots as shown below. LINK TO PAGE WITH MORE INFO. | We recommend all EBL users to do a dose test prior to exposing samples of significant value. As a starting point for you can consider to use the Demo.csf provided on the tool. This pattern is available in the auto generated user folder. The pattern consist of areas, curved elements, lines and dots as shown below. LINK TO PAGE WITH MORE INFO. | ||