Specific Process Knowledge/Lithography/EBeamLithography/eLINE: Difference between revisions
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==Dose information== | ==Dose information== | ||
The eLINE tool operates with four different dose types; area dose [µC/cm2], curved element dose [µC/cm2], line dose [pC/cm] and dot dose [pC]. Notice how the units are different for the line and dot doses. Also notice that the unit prefix changes from micro to pico. The dose for each type can be setup in a master setting under the "Patterning Parameter" and hence be valid for all exposures or they can be set for each individual element of a position list. | The eLINE tool operates with four different dose types; area dose [µC/cm2], curved element dose [µC/cm2], line dose [pC/cm] and dot dose [pC]. Notice how the units are different for the line and dot doses. Also notice that the unit prefix changes from micro to pico. The dose for each type can be setup in a master setting under the "Patterning Parameter" and hence be valid for all exposures or they can be set for each individual element of a position list. | ||
[[File:eLINE-Areas.png]] | [[File:eLINE-Areas.png]] | ||