Specific Process Knowledge/Lithography/EBeamLithography/eLINE: Difference between revisions
Appearance
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[[File:eLINE-Areas.png]] | [[File:eLINE-Areas.png]] | ||
[[File:eLINE-Curved.png]] | |||
[[File:eLINE-Lines.png]] | |||
[[File:eLINE-Dots.png]] | |||
Table of dose to clear on Si substrate: | Table of dose to clear on Si substrate: | ||