Jump to content

Specific Process Knowledge/Lithography/EBeamLithography/eLINE: Difference between revisions

Thope (talk | contribs)
Thope (talk | contribs)
Line 8: Line 8:


[[File:eLINE-Areas.png]]
[[File:eLINE-Areas.png]]
[[File:eLINE-Curved.png]]
[[File:eLINE-Lines.png]]
[[File:eLINE-Dots.png]]


Table of dose to clear on Si substrate:
Table of dose to clear on Si substrate: