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Specific Process Knowledge/Lithography/EBeamLithography/eLINE: Difference between revisions

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Thope (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab347-labadviser-users-35231
2,178 edits
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==Dose information==  
==Dose information==  
The eLINE tool operates with four different dose types; area dose [pC/cm2], curved element dose [pC/cm2], line dose [pC/cm] and dot dose [pC]. Notice that the last two first are dose per area, while the last two are dose per length and dose per dot, respectively.  
The eLINE tool operates with four different dose types; area dose [µC/cm2], curved element dose [µC/cm2], line dose [pC/cm] and dot dose [pC]. Notice how the units are different for the line and dot doses. Also notice that the unit prefix changes from micro to pico.  


[[File:eLINE-Areas.png]]
[[File:eLINE-Areas.png]]
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