Specific Process Knowledge/Lithography/EBeamLithography/eLINE: Difference between revisions
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==Dose information== | ==Dose information== | ||
The eLINE tool operates with four different dose types; area dose [pC/cm2], curved element dose [pC/cm2], line dose [pC/cm] and dot dose [pC]. Notice that the last two first are dose per area, while the last two are dose per length and dose per dot, respectively. | |||
[[File:eLINE-Areas.png]] | [[File:eLINE-Areas.png]] | ||