LabAdviser/Courses/TPT Thin Film: Difference between revisions

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Thin Film TPT

DTU Nanolab offers a Tool Package Training (TPT) course in thin film growth and deposition techniques.

Users that have to use any thin film growth and/or deposition tools in the cleanroom will have to sign up for the lectures before they apply for a training (i.e. it is possible to get a training and then attend the lectures afterwards).

Thin film tool package training (TPT)
Schedule	Theoretical part 1^st lecture (2 - 2½ hours): An introduction to thin films Material properties Overview of different thin film techniques at DTU Nanolab – 1^st part: Thermal oxidation Electroplating Sign up for the next lecture here: https://nanolab.doodle.com/poll/k4pdm2n4bpseww5e. At the moment there are no lectures scheduled in July and August. However, if you would like to attend the Thin Film TPT course during one of these months, then send an email to thinfilm@nanolab.dtu.dk. There is a chance that we can arrange a lecture, if more people want to attend this. Alternatively, we can send you a link to DTU Learn, where you can attend the course online. A date for a lecture in September will come after the Summer vacation. Please note that it is possible to apply for a training before you attend the lecture, if you send an email to training@nanolab.dtu.dk. 2^nd lecture (3 - 3½ hours): Vacuum basics Overview of different thin film techniques at DTU Nanolab – 2^nd part: PVD (physical vapour deposition) E-beam evaporation Thermal evaporation Sputtering CVD (chemical vapour depostion) LPCVD (low pressure chemical vapour deposition) PECVD (plasma enhanced chemical vapour deposition) ALD (atomic layer deposition) Sign up for the next lecture here: https://nanolab.doodle.com/poll/4r3ydwzzbrdepgpf The next lecture will be held on the 16th of June 2022 from 9:00 to 12:30. At the moment there are no lectures scheduled in July and August. However, if you would like to attend the Thin Film TPT course during one of these months, then send an email to thinfilm@nanolab.dtu.dk. There is a chance that we can arrange a lecture, if more people want to attend this. Alternatively, we can send you a link to DTU Learn, where you can attend the course online. A date for a lecture in September will come after the Summer vacation. Please note that it is possible to apply for a training before you attend the lecture, if you send an email to training@nanolab.dtu.dk. Practical part None
Location	Theoretical part The location of the lectures will be notified in the doodles
Qualified prerequisites	None
Preparations	Read Sami Franssila "Introduction to Microfabrication" (2010), Chapter 5: Thin-Film Materials and Processes (Available online from DTU campus).
Course responsible	The Thin Film group at DTU Nanolab (thinfilm@nanolab.dtu.dk)
Learning goals	Be aware of relevant material properties for thin films made in the cleanroom Understand importance of correct process pressure (for vacuum processes) Understand different thin film techniques Compare and be able to select appropriate thin film technique

Material for preparations and further information

Slides from the lectures

Slides from lecture 1

Lecture slide show Media:1_DTU_Nanolab_Thin_Film_TPT_final_June_2022.pptx

Slides from lecture 2

Lecture slide show Media:2_DTU_Nanolab_Thin_Film_TPT_final_September_2021.pptx

THIS PAGE IS UNDER CONSTRUCTION

Literature

Thermal Oxidation

S. Franssila, (2010), Introduction to Microfabrication, Chapter 13: Thermal Oxidation

@@ Line 29: / Line 29: @@
 <i>Sign up for the next lecture here: https://nanolab.doodle.com/poll/k4pdm2n4bpseww5e.
-The next lecture will be held on the 14th of June 2022 from 10:00 to 12:30.
+At the moment there are no lectures scheduled in July and August. However, if you would like to attend the Thin Film TPT course during one of these months, then send an email to thinfilm@nanolab.dtu.dk. There is a chance that we can arrange a lecture, if more people want to attend this. Alternatively, we can send you a link to DTU Learn, where you can attend the course online.
+A date for a lecture in September will come after the Summer vacation.
 Please note that it is possible to apply for a training before you attend the lecture, if you send an email to training@nanolab.dtu.dk.</i>
+<!--The next lecture will be held on the 14th of June 2022 from 10:00 to 12:30.-->
 <!-- If you cannot wait until September to join the lecture, then send an email to thinfilm@nanolab.dtu.dk. There is a chance that we can arrange a lecture in August, if more people wants to attend this, or that we can make a video of the lecture.-->
-<!-- The next lecture will be held online (using Zoom) on the 7th of June from 10:00 to 12:30
-The date will come after the summer vaction-->
 '''2<sup>nd</sup> lecture (3 - 3½ hours):'''
@@ Line 52: / Line 53: @@
 <i>Sign up for the next lecture here: https://nanolab.doodle.com/poll/4r3ydwzzbrdepgpf
-The next lectures will be held on the 16th of June 2022 from 9:00 to 12:30.
+The next lecture will be held on the 16th of June 2022 from 9:00 to 12:30.
+At the moment there are no lectures scheduled in July and August. However, if you would like to attend the Thin Film TPT course during one of these months, then send an email to thinfilm@nanolab.dtu.dk. There is a chance that we can arrange a lecture, if more people want to attend this. Alternatively, we can send you a link to DTU Learn, where you can attend the course online.
+A date for a lecture in September will come after the Summer vacation.
 Please note that it is possible to apply for a training before you attend the lecture, if you send an email to training@nanolab.dtu.dk.</i>
@@ Line 58: / Line 63: @@
 <!-- If you cannot wait until September to join the lecture, then send an email to thinfilm@nanolab.dtu.dk. There is a chance that we can arrange a lecture in August, if more people wants to attend this, or that we can make a video of the lecture.-->
-<!-- The next lecture will be held online (using Zoom) on the 7th of June from 10:00 to 12:30
-The date will come after the summer vaction-->
 <b>Practical part</b>