Specific Process Knowledge/Lithography/EBeamLithography/eLINE: Difference between revisions
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===Process information for the Raith eLINE Plus system=== | ===Process information for the Raith eLINE Plus system=== | ||
The system was installed in the cleanroom in May 2022. As we get more familiar with the tool this page will be populated with relevant process information. | The system was installed in the cleanroom in May 2022. As we get more familiar with the tool this page will be populated with relevant process information. | ||
==Dose information== | |||
Table of dose to clear on Si substrate: | Table of dose to clear on Si substrate: | ||