Specific Process Knowledge/Thin film deposition/Temescal: Difference between revisions
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Note that to date (May 2022) we have processes available for deposition of Al, Cr, Cu, Ge, Au, Ni, Nb, Pd, Pt, Ag, Ti, W and Ta as well as Ru. If your favorite metal is not available you are welcome to ask if we can buy a target and develop a recipe. | Note that to date (May 2022) we have processes available for deposition of Al, Cr, Cu, Ge, Au, Ni, Nb, Pd, Pt, Ag, Ti, W and Ta as well as Ru. If your favorite metal is not available you are welcome to ask if we can buy a target and develop a recipe. | ||
===Thickness measurement, deposition rate and process control=== | ===Thickness measurement, deposition rate and process control=== | ||