Specific Process Knowledge/Thin film deposition/Deposition of Gold: Difference between revisions
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You can read more about this issue [[Specific_Process_Knowledge/Thin_film deposition/Temescal/Particulates_in_Temescal_Au_films|here]]. | You can read more about this issue [[Specific_Process_Knowledge/Thin_film deposition/Temescal/Particulates_in_Temescal_Au_films|here]]. | ||
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==Quality control of e-beam evaporated TiAu films== | |||
{| border="1" cellspacing="2" cellpadding="2" colspan="3" | |||
|bgcolor="#98FB98" |'''Quality control (QC) for the Temescal''' | |||
|- | |||
| | |||
*[http://labmanager.dtu.dk/d4Show.php?id=5862&mach=429 QC procedure for the Temescal]<br> | |||
*[https://labmanager.dtu.dk/view_binary.php?type=data&mach=429 The newest QC data for the Temescal]<br> | |||
{| {{table}} | |||
| align="center" | | |||
{| border="1" cellspacing="1" cellpadding="2" align="center" style="width:400px" | |||
! QC Recipe: | |||
! Ti / Au | |||
|- | |||
|Deposition rate | |||
|10 Å/s | |||
|- | |||
|Thickness | |||
|10 nm / 90 nm | |||
|- | |||
|Pressure | |||
|Below 1*10<sup>-6</sup> mbar | |||
|- | |||
|} | |||
| align="center" valign="top"| | |||
{| border="2" cellspacing="1" cellpadding="2" align="center" style="width:440px" | |||
!QC limits | |||
!Temescal | |||
|- | |||
|Deposition rate deviation | |||
|± 20 % | |||
|- | |||
|Measured average thickness | |||
|± 10 % | |||
|- | |||
|Thickness deviation across a 4" wafer | |||
|± 5 % | |||
|- | |||
|} | |||
|- | |||
|} | |||
Thicknesses are measured in 5 points with one of the Dektak instruments. <br> | |||
Additionally we examine the newly deposited films for particles using the particle scanner (if available, otherwise we use the Jenatech microscope in darkfield mode) and we monitor the sheet resistance of the Ti/Au films. | |||
|} | |||
{| border="1" cellspacing="2" cellpadding="2" colspan="3" | |||
|bgcolor="#98FB98" |'''Quality control (QC) for Wordentec''' | |||
|- | |||
| | |||
*[http://labmanager.dtu.dk/d4Show.php?id=3736&mach=167 QC procedure for Wordentec]<br> | |||
*[https://labmanager.dtu.dk/view_binary.php?type=data&mach=167 The newest QC data for Wordentec]<br> | |||
{| {{table}} | |||
| align="center" | | |||
{| border="1" cellspacing="1" cellpadding="2" align="center" style="width:300px" | |||
! QC Recipe: | |||
! Ti / Au | |||
|- | |||
|Deposition rate | |||
|10 Å/s | |||
|- | |||
|Thickness | |||
|100 Å / 900 Å | |||
|- | |||
|Pressure | |||
|Below 2*10<sup>-6</sup> mbar | |||
|- | |||
|} | |||
| align="center" valign="top"| | |||
{| border="2" cellspacing="1" cellpadding="2" align="center" style="width:440px" | |||
!QC limits | |||
!Wordentec | |||
|- | |||
|Measured average thickness (Å) | |||
|900-1100 Å | |||
|- | |||
|Lowest accepted deposition rate (Å/s) | |||
|6 Å/s | |||
|- | |||
|} | |||
|- | |||
|} | |||
Thicknesses are measured in 5 points with one of the Dektak instruments. | |||
|} | |||