Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 01 processing: Difference between revisions
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!rowspan="2"| AZ 5214E image reversal<br><span style="color:red">Old German version</span> | !rowspan="2"| AZ 5214E image reversal<br><span style="color:red">Old German version</span> | ||
| 2020-03-01<br>taran | | 2020-03-01<br>taran | ||
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| >2 µm (a lot of stitching) | | >2 µm (a lot of stitching) | ||
| Reversal bake: 120s@110°C, Flood exposure: 200mJ/cm<sup>2</sup>, Dev: SP60s | | Reversal bake: 120s@110°C, Flood exposure: 200mJ/cm<sup>2</sup>, Dev: SP60s | ||
|-style="background: | |-style="background:LightGrey; color:black" | ||
| 2021-08-25<br>jehem | | 2021-08-25<br>jehem | ||
| 2.2 µm | | 2.2 µm | ||
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|-style="background:WhiteSmoke; color:black" | |-style="background:WhiteSmoke; color:black" | ||
! | !AZ MiR 701<br><span style="color:red">Old PFOA containing version</span> | ||
| | | 2021-08-25<br>jehem | ||
| 1.5 µm | | 1.5 µm | ||
| Fast | | Fast | ||
| 225 mJ/cm<sup>2</sup> | | 225 mJ/cm<sup>2</sup> | ||
| -4 | | -4 | ||
| 1.25 µm<br>Tested using dehydration reducing measures | | 1.25 µm<br>Tested using dehydration reducing measures | ||
| PEB: 60s@110°C, Dev: SP60s | | PEB: 60s@110°C, Dev: SP60s | ||
|-style="background:WhiteSmoke; color:black" | |||
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|-style="background: | |-style="background:LightGrey; color:black" | ||
!rowspan="2"| AZ nLOF 2020 | !rowspan="2"| AZ nLOF 2020 | ||
| 2020-02-01<br>jehem | | 2020-02-01<br>jehem | ||
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| 2 µm (due to stitching) | | 2 µm (due to stitching) | ||
| PEB: 60s@110°C, Dev: SP60s | | PEB: 60s@110°C, Dev: SP60s | ||
|-style="background: | |-style="background:LightGrey; color:black" | ||
| 2020-03-01<br>taran | | 2020-03-01<br>taran | ||
| 2.0 µm | | 2.0 µm | ||
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| 1 µm | | 1 µm | ||
| PEB: 60s@110°C, Dev: SP60s | | PEB: 60s@110°C, Dev: SP60s | ||
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|-style="background:WhiteSmoke; color:black" | |||
!AZ 5214E<br><span style="color:green">New Japanese version</span> | |||
| 2021-08-19<br>jehem | |||
| 1.5 µm | |||
| Fast | |||
| 120 mJ/cm<sup>2</sup> | |||
| -4 | |||
| 1.75 µm | |||
| Dev: SP60s | |||
|-style="background:WhiteSmoke; color:black" | |||
|- | |||
|- | |||
|-style="background:LightGrey; color:black" | |||
!AZ 5214E image reversal<br><span style="color:green">New Japanese version</span> | |||
| 2021-11-26<br>jehem | |||
| 2.2 µm | |||
| Fast | |||
| 14 mJ/cm<sup>2</sup> | |||
| -4 | |||
| 1.75 µm | |||
| Reversal bake: 60s@110°C, Flood exposure: 500mJ/cm<sup>2</sup>, Dev: SP60s | |||
|- | |||
|- | |||
|-style="background:WhiteSmoke; color:black" | |||
!AZ MiR 701<br><span style="color:green">New PFOA free version</span> | |||
| 2021-08-25<br>jehem | |||
| 1.5 µm | |||
| Fast | |||
| 225 mJ/cm<sup>2</sup> | |||
| -4 | |||
| 1.25 µm (due to stitching)<br>Tested using dehydration reducing measures | |||
| PEB: 60s@110°C, Dev: SP60s | |||
|- | |||
|- | |||
|-style="background:LightGrey; color:black" | |||
!AZ 4562<br><span style="color:green">New Japanese version</span> | |||
| <br>jehem | |||
| 10 µm | |||
| Fast | |||
| 750 mJ/cm<sup>2</sup> | |||
| 0 | |||
| ≤5 µm | |||
| Priming: HMDS<BR>Rehydration after SB: 1 hour (may not be necessary)<br>Exposure: Multiple exposures with pauses, 5 x (10 s exposure + 10 s pause)<br>Degassing after exposure: 1 hour (may not be necessary)<br>Development: Multiple puddles, 5 x 60 s | |||
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