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Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 01 processing: Difference between revisions

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Jehem (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, danchip
1,871 edits
Jehem (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, danchip
1,871 edits
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|-
|-
|-style="background:WhiteSmoke; color:black"
|-style="background:WhiteSmoke; color:black"
!rowspan="2"| AZ 5214E
!rowspan="2"| AZ 5214E<br><span style="color:red">Old German version</span>
|
| 2021-08-19<br>jehem
| 1.5 µm
| 1.5 µm
| Fast
| Fast
| 70 mJ/cm<sup>2</sup> (Jehem Oct 2020)
| 80 mJ/cm<sup>2</sup>
| 0 (Jehem Oct 2020)
| -4
| 2 µm (due to stitching)
| 2 µm (due to stitching)
| Dev: SP60s
| Dev: SP60s
Line 50: Line 50:
| 1.5 µm
| 1.5 µm
| Quality
| Quality
| 70 mJ/cm<sup>2</sup> (Jehem Oct 2020)
| 80 mJ/cm<sup>2</sup>
| 0 (Jehem Oct 2020)
| -4
| 1.25 µm
| 1.25 µm
| Dev: SP60s
| Dev: SP60s
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|-
|-
|-style="background:WhiteSmoke; color:black"
|-style="background:WhiteSmoke; color:black"
!rowspan="2"| AZ 5214E image reversal
!rowspan="2"| AZ 5214E image reversal<br><span style="color:red">Old German version</span>
|
| 2020-03-01<br>taran
| 2.2 µm
| 2.2 µm
| Fast
| Fast
| 43 mJ/cm<sup>2</sup> (Taran Mar 2020)
| 43 mJ/cm<sup>2</sup>
| 0 (Jehem Feb 2020)
| 0
| >2 µm (a lot of stitching)
| >2 µm (a lot of stitching)
| Reversal bake: 120s@110°C, Flood exposure: 200mJ/cm<sup>2</sup>, Dev: SP60s
| Reversal bake: 120s@110°C, Flood exposure: 200mJ/cm<sup>2</sup>, Dev: SP60s
|-style="background:WhiteSmoke; color:black"
|-style="background:WhiteSmoke; color:black"
|
| 2021-08-25<br>jehem
| 2.2 µm
| 2.2 µm
| Quality
| Quality
| 43 mJ/cm<sup>2</sup> (Taran Mar 2020)
| 26 mJ/cm<sup>2</sup>
| 0 (Jehem Feb 2020)
| -4
| 2 µm (due to stitching)
| 1.75 µm
| Reversal bake: 120s@110°C, Flood exposure: 200mJ/cm<sup>2</sup>, Dev: SP60s
| Reversal bake: 120s@110°C, Flood exposure: 200mJ/cm<sup>2</sup>, Dev: SP60s
|-
|-
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|-
|-
|-style="background:WhiteSmoke; color:black"
|-style="background:WhiteSmoke; color:black"
!rowspan="2"| AZ MiR 701
!rowspan="2"| AZ MiR 701<br><span style="color:red">Old PFOA containing version</span>
|
| 2020-02-01<br>jehem
| 1.5 µm
| 1.5 µm
| Fast
| Fast
| 300 mJ/cm<sup>2</sup> (Jehem Feb 2020)
| 300 mJ/cm<sup>2</sup>
| 0 (Jehem Feb 2020)
| 0
| 2 µm (due to stitching)
| 2 µm (due to stitching)
| PEB: 60s@110°C, Dev: SP60s
| PEB: 60s@110°C, Dev: SP60s
|-style="background:WhiteSmoke; color:black"
|-style="background:WhiteSmoke; color:black"
|
| 2022-08-25<br>jehem
| 1.5 µm
| 1.5 µm
| Quality
| Quality
| 180-200 mJ/cm<sup>2</sup> (Taran Mar 2020)
| 225 mJ/cm<sup>2</sup>  
| 0-1 (Jehem Mar 2020)
| -4
| 1 µm
| 1.25 µm
| PEB: 60s@110°C, Dev: SP60s
| PEB: 60s@110°C, Dev: SP60s
|-
|-
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